Design and fabrication of posfet devices for tactile sensing

Sensors and Actuators A: Physical

Adami

Collini

et al. 2013

Self Cite

This work presents fabrication and evaluation of novel POSFET (Piezoelectric Oxide Semiconductor Field Effect Transistor) devices based tactile sensing chip. In the newer version presented here, the tactile sensing chip has been fabricated using CMOS (Complementary Metal Oxide Semiconductor) technology. The chip consists of 4 x 4 POSFET touch sensing devices (or taxels) and both, the individual taxels and the array are designed to match spatiotemporal performance of the human fingertips. To detect contact events, the taxels utilize the contact forces induced change in the polarization level of piezoelectric polymer (and hence change in the induced channel current of MOS). The POSFET device on the chip have linear response in the tested dynamic contact forces range of 0.01-3 N and the sensitivity (without amplification) is 102.4 mV/N.

Section: Design and Fabricationmentioning

confidence: 99%

POSFET tactile sensing arrays using CMOS technology

Sensors and Actuators A: Physical

Adami

Collini

et al. 2013

Self Cite

“…The center-center dist two adjacent taxels ensures human li MOS part of the POSFET taxel is MOS technological module of a technology, based on 4µm p-w (ISFET)/CMOS process. The MOS interdigitated structure, for high a L=12µm) and hence large transcondu The fabrication step for develop are same as those used to develop device [12]. However, the fabricatio involves additional challenges such polymer film over the array and pol (a step needed to orient the dipoles and thus to obtain remanent polariz simultaneously.…”

Section: Tactile Sensing Array -mentioning

confidence: 99%

POSFET devices based tactile sensing arrays

Proceedings of 2010 IEEE International Symposium on Circuits and Systems

Lorenzelli

Metta

et al. 2010

This work presents and experimentally evaluates novel POSFET (Piezoelectric Oxide Semiconductor Field Effect Transistor) devices based tactile sensing arrays. The arrays, primarily developed for the robotic applications, consist of 5 x 5 POSFET touch sensing devices or taxels. The POSFET touch sensing devices are developed by spin coating piezoelectric polymer P(VDF-TrFE) film on the gate area of MOS devices and polarizing the film in situ. To detect contact events, the taxels utilize the contact forces induced change in the polarization level (and hence change in the induced channel current) of piezoelectric polymer. Both, individual taxels and the array are designed to match spatio-temporal performance of the human fingertips. Experimental results demonstrate that the POSFET tactile sensing arrays presented here are able to detect complex dynamic contact events such as rolling of an object.

“…Alternately, common source conf used to have better force resolution. ps, the input and e observed to be n step [14]. Table I, experienced by humans in normal manipulative tasks.…”

Section: B Experimental Resultsmentioning

confidence: 99%

Piezoelectric polymer oxide semiconductor field effect transistor (POSFET) devices for touch sensing

2009 2nd International Workshop on Electron Devices and Semiconductor Technology

Metta

Valle

2009

-This work presents the POSFET based touch sensing devices and their experimental evaluation. POSFET touch sensing devices presented here are primarily developed for the robotic applications. The design of these devices is inspired from human sense of touch. These devices are implemented by spin coating thin (~2.5 µm) piezoelectric polymer (PVDF-TrFE) film, directly on to the gate area of MOS transistor. The polymer film is processed in situ. The POSFET device represents an integral "sensotronic" unit comprising of transducer and the transistor and are thus capable of 'sensing and processing at same site'. The POSFET touch sensing devices are tested in a wide range (0.15-5N) of dynamic normal forces and at different frequencies.