Development of inertia driven micro robot with nano tilting stage for SEM operation

Nomura, Yoshihiro; Aoyama, Hisayuki

doi:10.1007/s00542-006-0360-3

Cited by 29 publications

(12 citation statements)

References 4 publications

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“…In the stacked form platforms, one layer only achieves one degree of freedom. Several motion principles have been applied to obtain this only one motion degree of freedom, for instance stick-slip principle [ 11 , 12 , 13 ], inchworm principle [ 14 , 15 , 16 , 17 ] and ultrasonic principle [ 18 , 19 , 20 ]. Afterwards, several layers should be stacked together to obtain the multi-DOF motion, which causes the challenge of reliability because of abrasion and complicated structures.…”

Section: Introductionmentioning

confidence: 99%

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

Liu

Zhao

2017

Micromachines

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A compact 2-DOF (two degrees of freedom) piezoelectric-driven platform for 3D cellular bio-assembly systems has been proposed based on “Z-shaped” flexure hinges. Multiple linear motions with high resolution both in x and y directions are achieved. The “Z-shaped” flexure hinges and the parallel-six-connecting-rods structure are utilized to obtain the lowest working stress while compared with other types of flexure hinges. In order to achieve the optimized structure, matrix-based compliance modeling (MCM) method and finite element method (FEM) are used to evaluate both the static and dynamic performances of the proposed 2-DOF piezoelectric-driven platform. Experimental results indicate that the maximum motion displacements for x-stage and y-stage are lx = 17.65 μm and ly = 15.45 μm, respectively. The step response time for x-stage and y-stage are tx = 1.7 ms and ty = 1.6 ms, respectively.

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Section: Introductionmentioning

confidence: 99%

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

Liu

Zhao

2017

Micromachines

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“…This desirable feature is attractive to many high precision servo applications, such as scanning electron microscopy (SEM), e-beam lithography (EBL), x-ray lithography, scanning tunneling microscopy, and some highly sensitive anti-vibration systems. In particular, PEA in the SEM system can help to improve the imaging resolution and to add a viewing angle to the system [1].…”

Section: Introductionmentioning

confidence: 99%

Line stitching in servo-assisted electron beam lithography system

Yen

Chen

Chiu

2011

2011 IEEE/ASME International Conference on Advanced Intelligent Mechatronics (AIM)

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Maskless electron beam direct write lithography gains more and more attention in the candidates of next-generation lithography technologies. Pattern-placement inaccuracy is a challenging topic which is vital for seamless pattern generation. In this work, a high-resolution piezo-actuated nano stage is integrated into a commercial scanning electron microscope and cooperates with a two-axis coarse stage. Three-axis laser interferometer system is setup in surrounding of the vacuum chamber to establish a global positioning scale of the composite wafer stage. Feedback control is achieved by PID controllers which are implemented in a digital control system. Coupling of the multi-axis piezo-stage is shown, and the performance of the PID controllers is also demonstrated. Stitching of sub-micron line-type pattern over millimeter-range areas is demonstrated. Index Terms -Electron beam lithography, pattern stitching, nano stage, piezoelectric actuator, laser interferometer system.

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“…Therefore, the total compliance matrixes of the right-angle, right-circle and "Z-shaped" flexure hinge are achieved by the equation (11), (12) and (16), respectively.…”

Section: R  Andmentioning

confidence: 99%

“…In the stacked form platforms, one layer only achieves one degree of freedom. Several 2 of 14 motion principles have been applied to obtain this only one motion degree of freedom, for instance stick-slip principle [11][12][13], inchworm principle [14][15][16][17] and ultrasonic principle [18][19][20]. Afterwards, several layers should be stacked together to obtain the multi-DOF motion, which causes the challenge of reliability because of abrasion and complicated structures.…”

Section: Introductionmentioning

confidence: 99%

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

Li¹,

Liu²,

Zhao³

2017

Preprint

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Abstract:A compact 2-DOF (two degrees of freedom) piezoelectric-driven platform for 3D cellular bio-assembly systems has been proposed based on "Z-shaped" flexure hinges. Multiple linear motions with high resolution both in x and y directions are achieved. The "Z-shaped" flexure hinges and the parallel-six-connecting-rods structure are utilized to obtain the lowest working stress while compared with other types of flexure hinges. In order to achieve the optimized structure, matrix-based compliance modeling (MCM) method and finite element method (FEM) are used to evaluate both the static and dynamic performances of the proposed 2-DOF piezoelectric-driven platform. Experimental results indicate that the maximum motion displacements for x stage and y stage are lx=17.65 μm and ly=15.45 μm, respectively. The step response time for x stage and y stage are tx=1.7 ms and ty =1.6 ms, respectively.

show abstract

Development of inertia driven micro robot with nano tilting stage for SEM operation

Cited by 29 publications

References 4 publications

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

Line stitching in servo-assisted electron beam lithography system

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

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Development of inertia driven micro robot with nano tilting stage for SEM operation

Cited by 29 publications

References 4 publications

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

Line stitching in servo-assisted electron beam lithography system

A Compact 2-DOF Piezoelectric-Driven Platform Based on &ldquo;Z-Shaped&rdquo; Flexure Hinges

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A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges