A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

Li, Jianping; Liu, Hui; Zhao, Hongwei

doi:10.3390/mi8080245

Cited by 32 publications

(16 citation statements)

References 26 publications

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“…Since the elongation of the piezoelectric stack itself is not enough to ensure the clamping force with the mover, it needs to be combined with the displacement amplifier. In the method of amplifying the output displacement of a piezoelectric stack, a flexure hinge amplifier has the advantages of high efficiency, no backlash, and is easy to manufacture [ 28 , 29 ]. Different hinged displacement amplifiers are used in different fields according to their shapes.…”

Section: Piezoelectric Partmentioning

confidence: 99%

Design and Locomotion Study of Two-DOF Actuator Driven by Piezoelectric–Electromagnetic Hybrid Mode

Wang

et al. 2022

Sensors

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A piezoelectric actuator (PEA) has the characteristics of high control precision and no electromagnetic interference. To improve the degree of freedom (DOF) to adapt to more working scenes, a piezoelectric–electromagnetic hybrid-driven two-DOF actuator is proposed. The PEA adopts the composite structure of the lever amplification mechanism and triangular amplification mechanism. The structure effectively amplifies the output displacement of the piezoelectric stack and increases the clamping force between the driving foot and the mover. The electromagnetic actuator (EMA) adopts a multi-stage fractional slot concentrated winding permanent magnet synchronous actuator, which can better match the characteristics of PEA. The structure and working principle of the actuator are introduced, the dynamic analysis is carried out, and the factors affecting the clamping force are obtained. At the same time, the air gap magnetic field is analyzed, and the structural size of the actuator is optimized. The experiment shows that the maximum driving speed can reach 348 mm/s, the load capacity is 3 kg, the optimal initial rotor angle is 49°, the maximum torque is 2.9 N·m and the maximum speed is 9 rad/s, which proves the stability and feasibility of the actuator.

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Section: Piezoelectric Partmentioning

confidence: 99%

Design and Locomotion Study of Two-DOF Actuator Driven by Piezoelectric–Electromagnetic Hybrid Mode

Wang

et al. 2022

Sensors

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“…The direct-push type actuator mainly utilizes the piezoelectric elements such as piezoelectric stack, piezoelectric wafer to directly push the mechanism to obtain small deformation. It has the advantages of simple structure and reliable system; however, its working stroke is small (generally several micrometers), which leads to limitation on the occasion of the motion with large working stroke [11][12][13][14][15]. The step type actuator could overcome the shortcoming of small working stroke by accumulating each step continuously, which is becoming a hot topic [16][17][18][19].…”

Section: Introductionmentioning

confidence: 99%

A Novel Bionic Piezoelectric Actuator Based on the Walrus Motion

Cai

Wan

et al. 2021

J Bionic Eng

Self Cite

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A novel bionic piezoelectric actuator based on the walrus motion to achieve high performance on large working stroke for micro/nano positioning systems is first proposed in this study. The structure of the proposed walrus type piezoelectric actuator is described, and its motion principle is presented in details. An experimental system is set up to verify its feasibility and explore its working performances. Experimental results indicate that the proposed walrus type piezoelectric actuator could realize large working stroke with only one driving unit and one coupled clamping unit; the maximum stepping displacement is ΔLmax = 19.5 μm in the case that the frequency f = 1 Hz and the voltage U = 120 V; the maximum speed Vmax = 2275.2 μm · s−1 when the frequency f = 900 Hz and the voltage U = 120 V; the maximum vertical load mmax = 350 g while the voltage U = 120 V and the frequency f = 1 Hz. This study shows the feasibility of mimicking the bionic motion of the real walrus animal to the design of piezoelectric actuators, which is hopeful for the real application of micro/nano positioning systems to achieve large working stroke and high performance.

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“…Guo et al [ 26 ] designed a compact 3-DOF micro/nano positioning platform based on the plane control principle of three piezoelectric actuators. In order to make the flexure hinge mechanism more compact, Li et al [ 27 ] proposed the design of Z-type hinge. Cai et al [ 28 ] designed a flexible motion platform for a precision positioning control system with 6-DOF by using three symmetrical T-shaped hinges and three elliptical flexure hinges.…”

Section: Introductionmentioning

confidence: 99%

Research on a New Type of Rigid-Flexible Coupling 3-DOF Micro-Positioning Platform

Wang

et al. 2020

Micromachines

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A new type of rigid-flexible coupling three degrees of freedom (3-DOF) micro-positioning platform with high positioning accuracy and high bearing capacity is developed, which consists of flexible drive mechanism and rigid platform. The flexible drive mechanism consists of three sets of symmetrical parallel round flexible hinge structures, each with a wedge structure in the middle of the symmetrical parallel flexible hinge. The rigid platform has an inclined plane with the same angle as the wedge, while the wedge structure is used to achieve the self-locking effect. The flexibility matrix method and ANSYS are used to analyze the statics of the flexible drive mechanism. The first four natural frequencies of the platform are obtained by dynamic simulation analysis. A symmetrical rigid flexible coupling micro-positioning platform experimental system is developed. Output characteristics, positioning accuracy, relationship between frequency and amplitude, and bearing performance of the micro-positioning platform are tested. These experimental results obviously show that the micro-positioning platform has good motion characteristics, high positioning accuracy, large movement distance, and large load bearing capacity performance.

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A Compact 2-DOF Piezoelectric-Driven Platform Based on “Z-Shaped” Flexure Hinges

Cited by 32 publications

References 26 publications

Design and Locomotion Study of Two-DOF Actuator Driven by Piezoelectric–Electromagnetic Hybrid Mode

Design and Locomotion Study of Two-DOF Actuator Driven by Piezoelectric–Electromagnetic Hybrid Mode

A Novel Bionic Piezoelectric Actuator Based on the Walrus Motion

Research on a New Type of Rigid-Flexible Coupling 3-DOF Micro-Positioning Platform

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