Development of high mobility top gate IGZO-TFT for Automotive OLED display.

Abstract

We report the high performance top gate IGZO-TFT for OLED display. By optimizing the conditions of process, we fabricated the transistor with mobility from 7 to 32 cm 2 /Vs with enhanced threshold voltage. They also have reliability PBT/NBT enough to use application. Finally, the prototype 12.3" ultrawide flexible OLED display was successfully demonstrated.

24‐1: Invited Paper: Development of High Quality IGZO‐TFT with Same On‐Current as LTPS

“…We have adopted IGZO TFTs with both top and bottom gate (double gate) to enhance its on current. Previously, we have reported top-gate IGZO (TG-IGZO) fabrication process [4]. This time we have added bottom gate layer under the TG-IGZO structure to form double gate structure.…”

“…SHARP Corp. started mass production of the IGZO-LCDs in 2012 for the first time in the world [3]. Since then, we have improved the mobility by 1.5 times higher and evolved the IGZO generation aiming to expand the range of IGZO technology application as an alternative to LTPS [4]. Figure 1 shows the Hall mobility of different IGZO films as a function of the carrier concentration.…”

24‐4: Distinguished Paper: High Refresh Rate and Low Power Consumption AMOLED Panel Using Top‐gate n‐Oxide and p‐LTPS TFTs

“…The source and drain electrodes, and the contact holes of the LTPS and IGZO TFTs are formed simultaneously. The top gate insulator (TGI) of the IGZO was formed by the plasma enhanced chemical vapor deposition (PECVD) method and carefully optimized for improving IGZO TFTs electrical properties and the reliability [14].…”

14‐3: Flexible Image Sensor Array Using IGZO TFT Backplane Technology for X‐ray Detector

“…IGZO is a compound of Indium (In), Gallium (Ga), Zinc (Zn), and Oxide (O). When IGZO is used for TFT, it allows low current leakage when the transistor is off and has a fast response speed [7].…”