Development of Fuses for Protection of Geiger-Mode Avalanche Photodiode Arrays

Abstract

Current-limiting fuses composed of Ti/Al/Ni were developed for use in Geigermode avalanche photodiode arrays for each individual pixel in the array. The fuses were designed to burn out at $4.5 9 10 À3 A and maintain post-burnout leakage currents less than 10 À7 A at 70 V sustained for several minutes. Experimental fuse data are presented and successful incorporation of the fuses into a 256 9 64 pixel InP-based Geiger-mode avalanche photodiode array is reported.