Development of automated microrobot-based nanohandling stations for nanocharacterization

Abstract

Current research work on the development of automated microrobot-based nanohandling stations (AMNSs) using the probe of an atomic force microscope (AFM) as an endeffector is presented. The manipulation of individual multiwalled carbon nanotubes (MWCNTs) and the characterization of biological objects, as for instance cells or ligand-receptor bindings are aspired applications. For this reason, the developed AMNSs have to be integrated both into a scanning electron microscope (SEM) for the nanomanipulation of carbon nanotubes (CNTs) and into an optical microscope for the cell characterization. Such an AMNS combines different micro-and nanomanipulators, each offering three degrees of freedom, in order to perform the coarse and fine positioning between object and endeffector. Piezo-resistive AFM probes are applied as endeffectors allowing to measure the acting forces and to realize force feedback for the station's control system. First, investigations have been carried out by bending MWCNTs and calculating their Young's modulus. Electrically conductive adhesives (ECAs) have been developed for the microelectronics industry, and their mechanical properties have to be determined. Therefore an AMNS for the mechanical characterization of thin ECA coatings by nanoindentation inside an SEM is presented as well, showing first experimental results. The three application areas shown in this paper will provide the basis for using the considered materials in MEMS/NEMS-and biosensor-devices.

Recent Advances on SEM-Based In Situ Multiphysical Characterization of Nanomaterials

“…In Situ Mechanical Characterization. In situ bending test was performed on individual multiwalled carbon nanotubes (MCNTs) to characterize its Young's modulus, where the bending force was detected by a piezoresistive atomic force microscope (AFM) probe [29], as shown in Figure 1(a). Also, the individual MCNT's Young's modulus can be determined by in situ buckling test [18,30], as shown in Figure 1(b).…”

A Review on Microscopic Visual Servoing for Micromanipulation Systems: Applications in Micromanufacturing, Biological Injection, and Nanosensor Assembly

“…Its ability to incorporate various pieces of microvision information in one integrated package also lays a solid foundation for the automation and intelligence of micromanipulation systems, which is instrumental to the achievement of safe, stable and accurate micro-object manipulation. This integrated system is called a microvision system [24,[34][35][36], as shown in Figure 3a. However, at present, there are still many problems to be solved in microvision systems.…”

Recent advances in nanorobotic manipulation inside scanning electron microscopes

“…Over the past decade, progress in automated nanomanipulation tasks has been achieved 49,170 . Table 5 summarizes representative automated nanomanipulation.…”