Development of an electrothermal micro positioning platform for laser targets with two degrees of freedom

Nakic, Christian; Bieker, Johannes; Lämmle, David; Winterstein, Thomas; Schlaak, Helmut F.; Schaumann, G.; Abel, Torsten

doi:10.1109/marss.2016.7561700

Cited by 5 publications

(4 citation statements)

References 2 publications

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“…The linked structure realizes bi-directional movement without angular deflection, switching between four positions and placing the fiber in the groove. Another coupled actuator was demonstrated in the micro-positioning platform for laser targets [63]. The so-called kinematic structure with several electrothermal actuators can perform a 2 degrees-of-freedom (DOF) multimode actuation.…”

Section: Bi-directional Actuatorsmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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This paper presents a review of electrothermal micro-actuators and applications. Electrothermal micro-actuators have been a significant research interest over the last two decades, and many different designs and applications have been investigated. The electrothermal actuation method offers several advantages when compared with the other types of actuation approaches based on electrostatic and piezoelectric principles. The electrothermal method offers flexibility in the choice of materials, low-cost fabrication, and large displacement capabilities. The three main configurations of electrothermal actuators are discussed: hot-and-cold-arm, chevron, and bimorph types as well as a few other unconventional actuation approaches. Within each type, trends are outlined from the basic concept and design modifications to applications which have been investigated in order to enhance the performance or to overcome the limitations of the previous designs. It provides a grasp of the actuation methodology, design, and fabrication, and the related performance and applications in cell manipulation, micro assembly, and mechanical testing of nanomaterials, Radio Frequency (RF) switches, and optical Micro-Electro-Mechanical Systems (MEMS).

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Section: Bi-directional Actuatorsmentioning

confidence: 99%

Review of Electrothermal Actuators and Applications

2019

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“…As compared to ESA, ETA can generate a larger force with a more compact structure and relative lower driving voltage requirement, and it also provides high accuracy output with good repeatability [40]. However, ETA's working principle governs that it has some problems like low frequency, high power consumption and nonlinear movement [41,42].…”

Section: Electrothermal Actuatormentioning

confidence: 99%

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

2018

Actuators

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Micromanipulation is a hot topic due to its enabling role in various research fields. In order to perform a high precision operation at a small scale, compliant mechanisms have been proposed and applied for decades. In microscale manipulation, micro-/nano-positioning is the most fundamental operation because a precision positioning is the premise of subsequent operations. This paper is concentrated on reviewing the state-of-the-art research on complaint micro-/nano-positioning stage design in recent years. It involves the major processes and components for designing a compliant positioning stage, e.g., actuator selection, stroke amplifier design, connecting scheme of the multi-DOF stage and structure optimization. The review provides a reference to design a compliant micro-/nano-positioning stage for pertinent applications.

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“…Generally, the magnitude of the thermal expansion is small, but many approaches for amplifying this expansion can produce relatively large displacements and force. For example, Nakic et al . (2016) designed and fabricated an electrothermal actuated micro positioning platform with two degrees of freedom and employed in pump-probe-experiments, as shown in Figure 4(a).…”

Section: The Actuators Of Robotic Manipulatorsmentioning

confidence: 99%

“…For example, Feng et al . (2016) designed an electrothermal gripper, and the displacement of the micro-gripper is observed to be 311 μm for an applied current of 0.26 A with maximum power dissipation of 0.4 W. Nakic et al (2016) designed a platform actuated by electrothermal actuators which allows a positioning accuracy of less than 5 μm. Steiner et al .…”

Section: The Actuators Of Robotic Manipulatorsmentioning

confidence: 99%

How to achieve precise operation of a robotic manipulator on a macro to micro/nano scale

Shi

Wang

et al. 2017

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Purpose The purpose of this paper is to present state-of-the-art approaches for precise operation of a robotic manipulator on a macro- to micro/nanoscale. Design/methodology/approach This paper first briefly discussed fundamental issues associated with precise operation of a robotic manipulator on a macro- to micro/nanoscale. Second, this paper described and compared the characteristics of basic components (i.e. mechanical parts, actuators, sensors and control algorithm) of the robotic manipulator. Specifically, commonly used mechanisms of the manipulator were classified and analyzed. In addition, intuitive meaning and applications of its actuator explained and compared in details. Moreover, related research studies on general control algorithm and visual control that are used in a robotic manipulator to achieve precise operation have also been discussed. Findings Remarkable achievements in dexterous mechanical design, excellent actuators, accurate perception, optimized control algorithms, etc., have been made in precise operations of a robotic manipulator. Precise operation is critical for dealing with objects which need to be manufactured, modified and assembled. The operational accuracy is directly affected by the performance of mechanical design, actuators, sensors and control algorithms. Therefore, this paper provides a categorization showing the fundamental concepts and applications of these characteristics. Originality/value This paper presents a categorization of the mechanical design, actuators, sensors and control algorithms of robotic manipulators in the macro- to micro/nanofield for precise operation.

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Development of an electrothermal micro positioning platform for laser targets with two degrees of freedom

Cited by 5 publications

References 2 publications

Review of Electrothermal Actuators and Applications

Review of Electrothermal Actuators and Applications

Survey on Recent Designs of Compliant Micro-/Nano-Positioning Stages

How to achieve precise operation of a robotic manipulator on a macro to micro/nano scale

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