Development of a two-degree-of-freedom piezoelectric rotary-linear actuator with high driving force and unlimited linear movement

Abstract

Piezoelectric actuators are considered as standard structural elements in Microsystems Technology. A piezoelectric transducer conventionally works as a pure linear motor ͑piezotranslator͒. If a rotation is required from the piezoelectric transducer, a transmission mechanism must be designed. This article presents a study on the development of a novel two-degree-of-freedom piezoelectric rotary-linear actuator system, including ͑1͒ conceptual design, ͑2͒ dynamic modeling, ͑3͒ control, and ͑4͒ prototype. The experimental validation of these concepts was performed. The preliminary result of the experiment has shown that the proposed concept works very well; in particular, the system has achieved ͑1͒ the linear displacement resolutions: 26 nm, ͑2͒ the angular displacement resolution: 0.019°, ͑3͒ the maximum driving force: 2.09 N, and ͑4͒ the maximum driving torque: 12.20 N mm.

Design and driving characteristic researches of a novel bionic stepping piezoelectric actuator with large load capacity based on clamping blocks

“…The major innovative feature of the actuator is a novel type of clamping principle that uses the self-locking effect between each pair of clamping surfaces to firmly clamp the mover (Wu et al 1996;Sun and rong 2001;Zhang et al 2006;Kim et al 2002;lobontiu et al 2001; awabdy et al…”

A novel piezo-driven linear-rotary inchworm actuator

“…Moreover, the increased output displacement is at the cost of the decreased output force. This situation leads to the development of some novel piezo-driven actuation techniques, namely, ultrasonic type, inertial type, impact type, and inchworm type, which can overcome the above difficulties [13][14][15][16][17].…”

Sliding Mode Control with Dynamical Correction for Time-Delay Piezoelectric Actuator Systems

“…Among precision micropositioning systems, piezoelectric actuators (PEAs) are highly suitable due to their excellent behavior in terms of response time, mechanical force, and extremely fine resolution [1][2][3]. The use of piezoelectric actuators (PEA) proved to be effective in diverse devices where micropositioning is required, such as valve control [4], precision stages [5,6], linear motor systems [7], and piezoelectric friction-inertia actuators (PFIAs) [8].…”