Development of a tunable polarimetric scatterometry system in the MWIR and LWIR

Fitzgerald, Thomas M.; Marciniak, Michael A.; Nauyoks, Stephen E.

doi:10.1117/12.859870

Cited by 4 publications

(3 citation statements)

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“…With the addition of rotating wave plates and polarizers, it was possible for us to convert this CASI into a polarimetric BSDF instrument [see Fig. 1 [1,2]. For this research, rather than attempting to separately assign the error associated with individual components of the physical apparatus, overall system noise and a noise floor are assigned numerically to form analysis of error propagation on polarimetric measurements.…”

Section: Theory a Bsdfmentioning

confidence: 99%

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Effects of a measurement floor on Mueller matrix measurements in a dual rotating retarder polarimeter bidirectional scatter distribution function system

Nauyoks

Marciniak

2015

Appl. Opt.

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Since a measurement of the bidirectional scatter distribution function (BSDF) of a material is proportional to the intensity of the scattered light, a BSDF measurement system with the addition of a dual rotating retarder polarimeter can be used to calculate the Mueller matrix of a scatterer. One advantage of a BSDF system using a laser source is its large dynamic range, which allows the measurement of scattered light both near to and away from the specular region. As BSDF measurements move away from the specular region and into a more diffuse-scatter region, the measured signal decreases and may approach the system's measurement floor. Therefore, BSDF and Mueller-matrix measurements are dependent not only on the scatter from the sample but also on the noise floor of the system. By analyzing numerically created bidirectional reflectance distribution function data, we show that since the noise floor of a system is typically constant, the Mueller-matrix measurement at the noise floor appears to be that of a perfect depolarizer. Therefore, as the BSDF measurement space moves away from the high-signal region and the noise floor is approached, the Mueller matrix assigned to the sample artificially approaches that of a perfect depolarizer. The rate and location in scatter-angle space of this shift is dependent on the BSDF of the material and on the signal-to-noise ratio in the system. Therefore, caution must be taken when drawing conclusions about measured Mueller matrices for scattered light, particularly in measurement regions where the measured signal approaches the system floor.

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Section: Theory a Bsdfmentioning

confidence: 99%

“…With the addition of phase-retarding wave plates, polarizers, and rotation stages, a BSDF instrument can be turned into a Mueller-matrix (Mm) scatterometer [1][2][3]. One particular method of creating a Mm scatterometer is with a dual rotating retarder (DRR) configuration [1,2].…”

Section: Introductionmentioning

confidence: 99%

Effects of a measurement floor on Mueller matrix measurements in a dual rotating retarder polarimeter bidirectional scatter distribution function system

Nauyoks

Marciniak

2015

Appl. Opt.

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“…With the addition of waveplates, a polarizer, an analyzer, and rotation stages, a BSDF instrument can be turned into a Mueller matrix scatterometer. 1,2 This allows the user to measure not only where the light is scattered but how the polarization state of the scattered light may change. The advantage of a Mueller matrix scatterometer is that it can be used to calculate how a sample changes the polarization of the specularly reflected and directly transmitted beam, as well as the off specularly scattered and transmitted beam.…”

Section: Introductionmentioning

confidence: 99%

Effects of a measurement floor on Mueller matrix measurements in a DRR BSDF system

Nauyoks¹,

Marciniak²

2012

SPIE Proceedings

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Since the bidirectional scatter distribution function (BSDF) is proportional to the intensity of the scattered light, a BSDF system with the addition of a dual rotating retarder system can be used to calculate the Mueller matrix of a scatterer. An advantage of a BSDF system is the large dynamic range which allows the measurement of scattered light both near to and far from the specular region. In some cases as measurements move away from the specular and into the scatter region, the measured signal decreases and the system reaches a measurement floor. Therefore, any BSDF and Mueller matrix measurements are dependent on the scatter from the sample and on the noise floor of the system. Since the noise floor of an electro-optical system is near constant, the Mueller matrix measurement of the noise floor will be that of a perfect depolarizer. As the measurement space moves away from the high-signal region, the scattered signal decreases and the floor of the system is approached so the Mueller matrix measurements can shift towards a perfect depolarizer. The rate and location of this shift will be dependent on how Lambertian the sample is and the ratio of signal to noise in the system. Because of this tendency, caution must be taken when drawing conclusions about the Mueller matrix of scattered light, particularly in the scatter measurement region where the measured signal approaches the system floor.

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Room-Temperature Quantum Cascade Laser: ZnO/Zn1−x Mg x O Versus GaN/Al x Ga1−x N

Chou

Mazady

Zeller

et al. 2013

Journal of Elec Materi

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Development of a tunable polarimetric scatterometry system in the MWIR and LWIR

Cited by 4 publications

References 0 publications

Effects of a measurement floor on Mueller matrix measurements in a dual rotating retarder polarimeter bidirectional scatter distribution function system

Effects of a measurement floor on Mueller matrix measurements in a dual rotating retarder polarimeter bidirectional scatter distribution function system

Effects of a measurement floor on Mueller matrix measurements in a DRR BSDF system

Room-Temperature Quantum Cascade Laser: ZnO/Zn1−x Mg x O Versus GaN/Al x Ga1−x N

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