Development of a simple system for the simultaneous measurement of pitch, yaw and roll angular errors of a linear stage

Liu, Chien-Hung; Jywe, Wen-Yuh; Chen, Chao-Kwai

doi:10.1007/s00170-003-2041-z

Cited by 8 publications

(3 citation statements)

References 20 publications

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“…Moreover, the measurement accuracy is extremely susceptible to long-term environmental changes, reducing the overall accuracy. To improve the measurement efficiency, various methods of simultaneously measuring the 6DOF geometric errors of the linear axes of machine tools have been extensively studied, including methods based on the combination of laser interferometry and laser collimation [19][20][21], laser collimation [22,23], surface encoders [24,25], and diffraction gratings [26][27][28]. In addition, some commercial instruments have been developed, including API 5D/6D measuring instrument and Renishaw laser 6D simultaneous measurement system.…”

Section: Introductionmentioning

confidence: 99%

Comprehensive measurement model of geometric errors for three linear axes of computer numerical control machine tools

Jia

Zhang

Zheng

et al. 2021

Meas. Sci. Technol.

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The geometric error measurement of computer numerical control (CNC) machine tools is developing towards automation and high precision. This not only improves the measurement efficiency, but also reduces the error caused by the long measurement time. This paper proposes a high-efficiency, automatic method of measuring 21 geometric errors of the three linear axes of CNC machine tools and establishes a comprehensive measurement model. The measurement system and model are applicable to linear axis geometric error measurement for all CNC machine tools. The measurement model was developed using rigid body kinematics theory and combined with the ray-tracing method. It mainly analyses the error crosstalk, system errors caused by optical components, laser beam drift, and non-parallelism errors between the measuring beams. ZEMAX was used to verify the model accuracy. Further, repeatability and comparison experiments were conducted to confirm the reliability and accuracy of the measurement system and model.

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Section: Introductionmentioning

confidence: 99%

Comprehensive measurement model of geometric errors for three linear axes of computer numerical control machine tools

Jia

Zhang

Zheng

et al. 2021

Meas. Sci. Technol.

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show abstract

“…Fan et al built a 5D/ 6D measurement system consisting of several sets of laser Doppler measuring instruments and semiconductor lasers [32,33]. A method using a diffraction grating was proposed by Kim et al [34] and Liu et al [35]. A diffraction laser encoder was used by Lee et al [36].…”

Section: Introductionmentioning

confidence: 99%

A high-precision laser method for directly and quickly measuring 21 geometric motion errors of three linear axes of computer numerical control machine tools

Zheng

Feng

Zhang

et al. 2020

Int J Adv Manuf Technol

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Error compensation has become an important means of improving the manufacturing and processing accuracy of computer numerical control (CNC) machine tools. Quick and precise measurement of the various geometric motion errors (GMEs) of CNC machine tools is crucial. We propose a novel laser method for the efficient and direct high-precision measurement of the 21 GMEs of a three-axis CNC machine tool, or three linear axes of a five-axis tool. A corresponding system was developed, comprising a fiber-coupled laser unit, sensor head, target unit, and beam-steering unit. The beam-steering unit was designed to perform high-accuracy 90°rotation of the measuring beam, and the target unit was designed to be sensitive to 18 GMEs of the three linear axes. Stability, repeatability, and comparison experiments were conducted to verify the performance of the proposed system. The results showed that the stability of the position error measurement is ± 6.3 nm. For straightness error measurement, the stability, repeatability error, and residual are within ± 60.3 nm, ± 0.5 μm, and ± 0.7 μm, respectively. These are within ± 0.12 arcsec, ± 0.5 arcsec, and ± 0.5 arcsec for the pitch and yaw measurements, and within ± 0.37 arcsec, ± 1.5 arcsec, and ± 1.0 arcsec for the roll measurements, respectively. For squareness error measurement, the repeatability error and residual are within ± 0.6 arcsec and ± 1.6 arcsec, respectively. Compared with a laser interferometer, the proposed system can measure the 21 GMEs of a three-axis machine tool with one-step installation. Without accuracy loss, the measurement efficiency is approximately 45 times higher than that of a laser interferometer, thus providing a new quick and accurate measurement method of GMEs and error compensation of CNC machine tools.

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“…Jywe and Liu [7] developed an integrated measurement system using two one-dimensional position silicon detectors, which could measure geometric errors and perform a dynamic contouring test. Liu et al [8] developed simple system for simultaneous measurement of three angular errors of a linear stage. Their system integrated a laser source, two quadrant detectors and a diffraction grating.…”

Section: Introductionmentioning

confidence: 99%

Development of a DVD pickup-based four-degrees- of-freedom motion error measuring system for a single-axis linear moving platform

Huang

Liu

Jywe

et al. 2009

Proceedings of the Institution of Mechanical Engineers, Part B:

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In this study, a simple and high-resolution four-degrees-of-freedom (4-DOF) motion error measuring system based on DVD pickup has been proposed. It can simultaneously measure the horizontal straightness error and three angular errors of a single-axis linear moving platform. The horizontal straightness error is measured based on the focus technique of DVD pickup and the inverse algorithm is used to solve pitch, yaw, and roll angular errors through the kinematic analysis. The grating is mounted on the moving axis of a singleaxis linear moving platform and reflects incident laser beam into several diffractive rays. Photodiode IC (PDIC) of DVD pickup is set up for detecting the focus error signal (FES) of zeroorder diffraction ray from grating and quadrant detectors are set up for detecting the position of -1st-order diffraction rays from grating. The 4-DOF motion error measuring system detected the three angular errors with a related accuracy of about -1 arc sec for a measuring range of -100 arc sec, and detected horizontal straightness with a related accuracy of about -2 mm for a measuring range of -150 mm.

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Development of a simple system for the simultaneous measurement of pitch, yaw and roll angular errors of a linear stage

Cited by 8 publications

References 20 publications

Comprehensive measurement model of geometric errors for three linear axes of computer numerical control machine tools

Comprehensive measurement model of geometric errors for three linear axes of computer numerical control machine tools

A high-precision laser method for directly and quickly measuring 21 geometric motion errors of three linear axes of computer numerical control machine tools

Development of a DVD pickup-based four-degrees- of-freedom motion error measuring system for a single-axis linear moving platform

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