Development of a Scanning Tunneling Microscope for Surface Roughness Measurement. Trial of a Skid-type STM.

慧, 清野; 寛, 鈴木; 学伝, 単; 治, 鎌田

doi:10.2493/jjspe.58.1509

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Error Compensation and Separation In Machine Tool Integration1

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2019

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“…In this method, a skid with a large radius, which only senses the vibration and scan errors by spatially filtering out the surface texture information composed of higher spatial-frequency components, is used in combination with the stylus for error compensation. The same concept has been applied for a wide range STM [124] [206]. As shown in Fig.…”

Section: Error Compensation and Separation In Machine Tool Integrationmentioning

confidence: 99%

On-machine and in-process surface metrology for precision manufacturing

et al. 2019

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On-machine and in-process surface metrology are important for quality control in manufacturing of precision surfaces. The classifications, requirements and tasks of on-machine and in-process surface metrology are addressed. The state-of-the-art on-machine and in-process measurement systems and sensor technologies are presented. Error separation algorithms for removing machine tool errors, which is specially required in on-machine and in-process surface metrology, are overviewed, followed by a discussion on calibration and traceability. Advanced techniques on sampling strategies, measurement systems-machine tools interface, data flow and analysis as well as feedbacks for compensation manufacturing are then demonstrated. Future challenges and developing trends are also discussed.

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Section: Error Compensation and Separation In Machine Tool Integrationmentioning

confidence: 99%