2015
DOI: 10.1093/jmicro/dfv001
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Development of a monochromator for aberration-corrected scanning transmission electron microscopy

Abstract: In this article, we report the development of a new 200-kV analytical electron microscope equipped with a monochromator with an integrated double Wien-filter system. It enables us to study the electronic structures of materials in detail using electron energy-loss spectroscopy (EELS) analysis at an atomic scale. A highly monochromated and isotropically round electron probe is produced on the specimen plane. The ultimate energy resolutions with 0.1-s acquisition times are measured to be 36 meV at 200 kV and 30 … Show more

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Cited by 24 publications
(18 citation statements)
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“…The energy spread of the incident electrons are typically ∆E~0.4 eV with a cold field emission gun, which is enough to perform core-loss EELS measurements. Recent progress on the monochromator of an electron source, the energy resolution is greatly improved up to 10-30 meV (10 times better than that of a cold field emission gun), which makes it possible to measure the local bandgap and phonon excitation (vibrational spectroscopy) [157,158]. The most limiting factor for atomic-resolution imaging was 3rd order spherical aberration but at the end of last century the combination of multi-pole lens system (quadra-octa poles or hexapole lens system) solved the problem, the invention of aberration correctors.…”
Section: Imaging and Spectroscopy By Atomic-resolution Stemmentioning
confidence: 99%
“…The energy spread of the incident electrons are typically ∆E~0.4 eV with a cold field emission gun, which is enough to perform core-loss EELS measurements. Recent progress on the monochromator of an electron source, the energy resolution is greatly improved up to 10-30 meV (10 times better than that of a cold field emission gun), which makes it possible to measure the local bandgap and phonon excitation (vibrational spectroscopy) [157,158]. The most limiting factor for atomic-resolution imaging was 3rd order spherical aberration but at the end of last century the combination of multi-pole lens system (quadra-octa poles or hexapole lens system) solved the problem, the invention of aberration correctors.…”
Section: Imaging and Spectroscopy By Atomic-resolution Stemmentioning
confidence: 99%
“…In this stable environment, a high energy resolution below 30 meV was achieved. 24 EELS spectra were recorded with an accelerating voltage of 60 kV to reduce irradiation damage and a convergence/collection semi-angle of 30/35 mrad. The energy resolution, DE, specified in terms of the FWHM of the zero-loss peak, was controlled by changing the width of an energy selection slit in the monochromator.…”
Section: Tem Specimens Of Thin Films Of Licopo 4 Limn 2 O 4 and LI mentioning
confidence: 99%
“…While measurements with resolutions up to 0.3 eV (as determined by the full width half maximum (FWHM) of the zero-loss peak) can be obtained using cold-FE guns, 21 to obtain resolutions better than 0.1 eV requires use of monochromators. [22][23][24] The latter allows Li-K edge spectra to be used to measure Li concentrations and distributions quantitatively with nanoscale resolution, as reported for materials LiCoO 2 , 25,26 LiFePO 4 27,28 and Li 2 MnO 3 . 29 One drawback of this method, however, is that TM-M 2,3 (or TM-N 2,3 ) edges lie near to Li-K edges, making their peaks difficult to deconvolute.…”
Section: Introductionmentioning
confidence: 98%
“…Chemie then, researchers have worked to improve spatial resolution without sacrificing the energy resolution, [95][96][97][98][99][100][101][102][103][104] and the last five years have produced instruments with simultaneous % 5meV energy resolution and % 1 spatial resolution. [105,106] This new generation of instruments can be used to visualize and map nanoscale variations in previously inaccessible phenomena, such as surface phonon modes.…”
Section: Methodsmentioning
confidence: 99%