Development of a Microprobing System for Side Wall Detection Based on Local Surface Interaction Force Detection

Ito, So; Shima, Yusuke; Kato, Daichi; Matsumoto, Kimihisa; Kamiya, Kazuhide

doi:10.20965/ijat.2020.p0091

Cited by 9 publications

(4 citation statements)

References 30 publications

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“…Share force microscopy uses the amplitude damping of the oscillated sharp-edged sensing probe caused by the viscosity change to detect the surface [121]. This principle was used in the micro-CMM probe [48,115,[122][123][124] (Figure 12). A probe stylus was developed by gluing a glass microsphere to the tip of a sharpened glass pipette.…”

Section: Share-force-based Microprobe By Toyama Prefectural Umentioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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Micro-coordinate measuring machines (micro-CMMs) for measuring microcomponents require a probe system with a probe tip diameter of several tens to several hundreds of micrometers. Scale effects work for such a small probe tip, i.e., the probe tip tends to stick on the measurement surface via surface adhesion forces. These surface adhesion forces significantly deteriorate probing resolution or repeatability. Therefore, to realize micro-CMMs, many researchers have proposed microprobe systems that use various surface-sensing principles compared with conventional CMM probes. In this review, the surface-sensing principles of microprobe systems were the focus, and the characteristics were reviewed. First, the proposed microprobe systems were summarized, and the probe performance trends were identified. Then, the individual microprobe system with different sensing principles was described to clarify the performance of each sensing principle. By comprehensively summarizing multiple types of probe systems and discussing their characteristics, this study contributed to identifying the performance limitations of the proposed micro-probe system. Accordingly, the future development of micro-CMMs probes is discussed.

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Section: Share-force-based Microprobe By Toyama Prefectural Umentioning

confidence: 99%

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Michihata

2022

Metrology

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“…In the authors' previous works, probing was performed by using a vibrating micro-stylus to detect the local surface interaction force near the surface of the measured workpieces (Ito, et al, 2016a;Ito et al, 2016b;Chen, et al, 2016). The stylus vibration along the main axis of the stylus shaft in the microprobing system was employed to detect the local surface interaction force in all directions around the main axis (Ito, et al, 2020). However, in probing on a cylindrical pin gauge, the dispersion of the probing coordinates increased as the disagreement between the probe approaching direction and the normal direction of the measured object became larger.…”

Section: Introductionmentioning

confidence: 99%

Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe

Aruga

Ito²,

Kato³

et al. 2023

Front. Manuf. Technol.

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The inner diameter measurement of the micro-hole was performed by a tactile microprobing system using a method of the local surface interaction force detection. The inner diameter of the micro-hole was calculated by the least square method based on the probing coordinates obtained by a custom-made micro-coordinate measuring machine. The dispersion of the probing coordinates was investigated by changing the probe approaching direction with respect to the normal direction of the inner side of the micro-hole. During the probing inside the micro-hole, it was confirmed that the dispersion of the probing coordinates increased when the disagreement between the probe approaching direction and the normal direction of the micro-hole at the measured point became large. The influence of the dispersion of the probing coordinates was evaluated through the uncertainty analysis of the inner diameter measurement. It was revealed that the uncertainty of the inner diameter measurement could be improved when limiting the disagreement between the probe approaching direction and the normal direction of the micro-hole to within ±pi/4 rad.

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“…However, it is extremely difficult to accurately measure microstructures such as micrometer-order small holes and grooves with a high aspect ratio. Various microstructure measurement system based on different principles have been proposed [4][5][6][7][8][9][10][11][12][13][14][15].…”

Section: Introductionmentioning

confidence: 99%

Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings

et al. 2023

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The precise measurement of microstructures and other micron-sized materials has garnered considerable interest in recent years. We have developed a measurement system that uses an etched small diameter optical fiber as a stylus to measure microstructures with low contact force. However, when the diameter of the stylus tip is less than a few tens of micrometers, the surface forces between the measured surface and the stylus tip become larger than the gravity of the stylus tip, causing the stylus tip to stick to the measured surface. This adhesion leads to an increase in measurement time and a decrease in measurement accuracy. In this study, we fabricated a high-function stylus with water-repellent and antistatic coatings applied to the stylus tip to reduce the adhesion between the stylus tip and measured surface due to surface forces, and conducted performance evaluation tests. As a result, the average separation distance was 13.8 µm when a fluorinated resin coating with a contact angle of 105° was used, confirming that the influence of liquid bridge forces could be reduced by approximately 78%. Additionally, when static elimination experiments were conducted by scanning the charged surface at a pitch of 0.5 µm using an antistatic coating stylus with a gold on the stylus surface, the average adsorption distance was 3.6 µm, confirming that the effect of electrostatic force could be reduced by 71%.

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Development of a Microprobing System for Side Wall Detection Based on Local Surface Interaction Force Detection

Cited by 9 publications

References 30 publications

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Surface-Sensing Principle of Microprobe System for Micro-Scale Coordinate Metrology: A Review

Investigation of probing repeatability inside a micro-hole by changing probe approach direction for a local surface interaction force detection type microprobe

Development of a High-Function Fiber Stylus for Microstructure Measurement with Water-Repellent and Antistatic Coatings

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