Development of a micromechanical probe-measuring instrument for surface properties characterization

Abstract

A new type of micromechanical probe-measuring instrument for the characterization of micromechanical properties and in situ surface topography has been developed. It adopts a load-adding cantilever for surface indentation and a force-sensing cantilever for profile measurement. Both the surface indentation and the profile measurement are made by using the same diamond probe. The deflected displacement of the cantilever is measured by an optical sensor. The piezo-driven precision stage with wide motion range and high resonance frequency is utilized to move the specimen in x and y directions. The effectiveness of this instrument is verified by a test, and the experimental results are presented.

Development of a novel 3-DOF suspension mechanism for multi-function stylus profiling systems

“…In addition, the stress concentration will be more significant. Besides, Gao 22 designed a stylus profiling instrument, where a load-adding cantilever was adopted for surface indentation and a force-sensing cantilever was adopted for profile measurement. However, the dual-cantilever structure was complex and the system suffered from a slower response.…”

Design and Analysis of a Micromechanical Three-Component Force Sensor for Characterizing and Quantifying Surface Roughness

“…In past years micromechanical force sensors have been developed to perform characterization of micromechanical structures, such as determination of their spring characteristics and quantifying the surface roughness [4], [5], which cannot be accomplished by conventional force sensors due to their size, resolution and measurement range. Gao et al [6] used a micromechanical probe-measuring instrument to estimate the surface properties and characterize in situ surface topography. A load-adding cantilever and force-sensing cantilever were used for surface indentation and profile measurement to obtain the loaddepth plot and scanning image.…”

Mechanical design and optimization of a suspension of multi-function sensing probes

“…Surface measurement plays an important role in all manufacturing processes because it provides information on how well components are manufactured and subsequently how well they will perform [1]. Usually the surface measurement is confined to the measurement of surface texture or topography, which principally governs surface roughness.…”