Smart Structures, Devices, and Systems II 2005
DOI: 10.1117/12.582263
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Development of a MEMS device to monitor glaucoma

Abstract: Glaucoma is one of the leading causes of blindness affecting millions of people worldwide. Regular monitoring of intra ocular pressure (IOP) in the eyes is an important component in the treatment of this affliction. Current manual measurements do not give room for continuous indication of the progression of the disease. Microelectromechanical System (MEMS) technology lends itself to the development of devices capable of in-situ monitoring of the phenomenon that occur at the micro and nano scales, inside the hu… Show more

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“…A MEMS-based piezo resistive pressure sensor was previously characterised for IOP measurement by the author and output voltages were estimated [10]. It has been found upon further investigation that the stresses along the length and width of piezo resistors in a bridge configuration could vary greatly and this could cause the fractional change in resistance (dR 1 /R 1 , dR 2 /R 2 ) to be unequal and lead to a reduction in sensor output voltage.…”
Section: Mems Iop Sensormentioning
confidence: 99%
“…A MEMS-based piezo resistive pressure sensor was previously characterised for IOP measurement by the author and output voltages were estimated [10]. It has been found upon further investigation that the stresses along the length and width of piezo resistors in a bridge configuration could vary greatly and this could cause the fractional change in resistance (dR 1 /R 1 , dR 2 /R 2 ) to be unequal and lead to a reduction in sensor output voltage.…”
Section: Mems Iop Sensormentioning
confidence: 99%