2001
DOI: 10.1016/s0925-4005(01)00679-7
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Development of a low-power thick-film gas sensor deposited by screen-printing technique onto a micromachined hotplate

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Cited by 50 publications
(17 citation statements)
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“…These substrates can work in atmospheres under 300 • C with stable electric and chemical properties, which are based on the interactions of Pd-doping in Ag pastes. The required quantity of nanocomposites was evenly dispersed in the mixture of DI water and ethanol ratio of 1:1, then the paste was dispersed coated onto the interdigital area of Ag-Pd electrodes to form uniform, dense and smoothly deposited thick films by screen-printing technique [24,25]. Finally, after drying overnight, aging occurred at 120 • C for 120 h to ensure surface resistance value remained stable.…”
Section: Fabrication Of Planar Gas Sensormentioning
confidence: 99%
“…These substrates can work in atmospheres under 300 • C with stable electric and chemical properties, which are based on the interactions of Pd-doping in Ag pastes. The required quantity of nanocomposites was evenly dispersed in the mixture of DI water and ethanol ratio of 1:1, then the paste was dispersed coated onto the interdigital area of Ag-Pd electrodes to form uniform, dense and smoothly deposited thick films by screen-printing technique [24,25]. Finally, after drying overnight, aging occurred at 120 • C for 120 h to ensure surface resistance value remained stable.…”
Section: Fabrication Of Planar Gas Sensormentioning
confidence: 99%
“…The decrease of the operating temperature is one of the needed factors for viable gas sensors in industrial applications. Several Recently a micromachining and screen printing technique combination has been used to obtain SnO 2 based thick-film gas sensors [25,26]. The interest of this study is to improve the response of Sn-doped In 2 O 3 (ITO) thin films as regard to NH 3 gas at low operating temperature.…”
Section: Introductionmentioning
confidence: 99%
“…To decrease the power consumption of CO sensors, some attempts to use a microheater or a microhotplate have been reported in the past [4][5][6][7][8]. We have been doing research on a CO sensor based on an SnO 2 thin film that decreases the heating power consumption by using microheater technology.…”
Section: Introductionmentioning
confidence: 99%