Development of a Linear Micro Inductosyn Sensor

Dinulovic, Dragan; Hermann, David; Fluegge, Jens; Gatzen, H.H.

doi:10.1109/intmag.2006.375635

Cited by 12 publications

(6 citation statements)

References 6 publications

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“…Resolvers have trouble to make uniform coils, especially complex coils to overcome harmonics [22]- [24] introduced by sensor mechanical structure or unsymmetrical coils or excitations. Though inductosyns have no trouble like resolvers, they have very weak output voltage [25], [26] which is even in microvolt scale, as a result electrical part has heavy work to get smooth signals from sensor output signals. Relatively, this paper presents a new sensor structure which can avoid disadvantages that exist in resolvers and inductosyns.…”

Section: Introductionmentioning

confidence: 99%

An Inductive Angular Displacement Sensor Based on Planar Coil and Contrate Rotor

Tang

Peng

et al. 2015

IEEE Sensors J.

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This paper introduces a noncontact, low-cost, and reliable inductive sensor for angular displacement measurement. It is suitable to work in harsh industrial environments. The sensor has simple structure consisting of three key parts: 1) a ferromagnetic stator, which is a pure plane; 2) a ferromagnetic rotor, which has face slots; and 3) four layers of planar copper coils, including primary and secondary coils. Primary coils are supplied with two orthogonal 4000-Hz ac, and secondary coils output a signal whose phase is proportional to angular displacement. Primary coils are designed with sinusoidal shape, so that magnetic field between the stator and rotor has approximately sinusoidal distribution, and finally linearity between the phase variation of output signal and angular displacement is well helped by this design. The structure and working principles of the sensor are explained in detail. Moreover, a sensor model was simulated to verify the feasibility of the sensor working principles and a sensor prototype was designed for actual experiment. At last actual experiment results are given and analyzed, showing that the sensor prototype has achieved accuracy better than ±12 arcsec in the range of 0°-360°, and this kind of sensor may have a better performance by improving the layout of primary coils and front-end signal-process circuit.Index Terms-Non-contact inductive sensor, angular displacement, planar coils, contrate rotor, sinusoidal shape.

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Section: Introductionmentioning

confidence: 99%

An Inductive Angular Displacement Sensor Based on Planar Coil and Contrate Rotor

Tang

Peng

et al. 2015

IEEE Sensors J.

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“…T HE sinusoidal electromagnetic coupling systems are widely used in the sensor systems such as the magnetic positioning systems [1], voltage and current transformers [2], differential transformers [3], inductosyns [4], eddy current sensors [5], and etc. These systems are realized by finding the coupling relations between signal generating coils and receiving coils.…”

Section: Introductionmentioning

confidence: 99%

Recovering Amplitudes and Phases From Saturated Multifrequency Sinusoid Signals

Zhang

et al. 2013

IEEE Sensors J.

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In this paper, a novel method is proposed to recover and extract the original signal parameters from the saturated multifrequency sinusoid wave signals. It makes use of the zerocrossing characteristics of the multifrequency sinusoid signals, to collect valid samples in unsaturated parts of the signals. On these valid samples, the amplitudes and phases of the specific original ac sensing signals can be linearly computed by applying the least square method. The simulation results show that the proposed method has satisfactory accuracy even with very large saturation (∼10 times of the saturation limit) and large dc offset, which frees us from the restriction to avoid the signal saturation problem in the signal acquisition. The method is realized by the software algorithm, and no longer requires the common used hardware-the phase sensitive detection circuit. Hence when it is applied to the magnetic coupling system, we will obtain much simpler system composition, higher accuracy, and high execution speed.Index Terms-Multifrequency signal processing, amplitude and phase extraction, magnetic coupling, least square fitting method.

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“…However, compared to magnetic sensors using the Hall or AMR effect, they are less suitable to miniaturization (1). Nevertheless, an example of a miniaturized inductive system is a micro Inductosyn ® , which is fabricated using Micro Electromechanical Systems (MEMS) technology (2). Like a macroscopic Inductosyn ® (Figure 1), the sensing device consists of two elements, a scale and a slider (3).…”

Section: Introductionmentioning

confidence: 99%

Fabrication and Characterization of an Improved Micro Inductosyn

2013

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The standard linear Inductosyn ® system consists of two measurement elements, a scale and a slider. The stationary scale contains a single meander winding, while the moving slider has two meander windings for sensing. Unlike the standard Inductosyn ® , a second generation micro Inductosyn ® system has four sensing windings, which enables to correct a wedge shaped air gap between scale and slide due to a misalignment occurring during the final assembly process. As its first generation micro Inductosyn ® predecessor, it features magnetic flux guides not found in the standard Inductosyn ® system to improve coupling. The micro displacement sensor was fabricated using Micro Electro-mechanical System (MEMS) technology. The sensor components, such as meander windings and flux guides, were fabricated by electrodeposition. Moreover, PECVD was used to create an insulating layer between these components. In order to evaluate the system, a mechanical test fixture and an electronic measurement system were created.

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Development of a Linear Micro Inductosyn Sensor

Cited by 12 publications

References 6 publications

An Inductive Angular Displacement Sensor Based on Planar Coil and Contrate Rotor

An Inductive Angular Displacement Sensor Based on Planar Coil and Contrate Rotor

Recovering Amplitudes and Phases From Saturated Multifrequency Sinusoid Signals

Fabrication and Characterization of an Improved Micro Inductosyn

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