Development of a large-force low-loss metal-contact RF MEMS switch

Seki, T.; Uno, Yutaka; Narise, K.; Masuda, Takahiro; Inoue, K.; Sato, S.; Satô, Fumihiko; Imanaka, K.; Saito, Susumu

doi:10.1016/j.sna.2006.02.016

Cited by 45 publications

(12 citation statements)

References 2 publications

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“…RF-MEMS are very useful for wireless sensors [36] and reconfigurable antennas [37]. RF-MEMS show very good performance in switching speed (usually ranging from fractions of µs [38] to 300 µs [39]), scattering parameters, and power consumption (aside from leakage currents in the order of dozens of µA, electrostatically actuated RF-MEMS switches present a virtually zero power consumption [40]), and they have been demonstrated to work properly up to 90 GHz [41].…”

Section: Introductionmentioning

confidence: 99%

A Reconfigurable Pseudohairpin Filter Based on MEMS Switches

Donelli

Manekiya

Tagliapietra

et al. 2022

Sensors

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This work presents a bandpass-reconfigurable planar pseudohairpin filter based on RF-MEMS switches. Hairpin-line structures are preferred to design microstrip filters because this class of filters offers a more compact size, and, in general, hairpin filters do not need ground connections for resonators. In this work, the U-shape resonators are arranged to obtain an interdigit capacitor to improve the coupling between the resonators. RF-MEMS switches modify the lengths of coupled resonators by adding microstrip segments to control the filter bandwidth, moving the center frequency and the return loss. An experimental hairpin tunable filter prototype based on RF-MEMS has been designed, fabricated, numerically and experimentally assessed, and compared concerning its tunability, quality factor, and capability with standard tunable filters based on PIN diodes. In conclusion, the tunable hairpin filter based on RF-MEMS switches offers the best performance in center frequency tuning range, compactness, and power consumption regarding reconfigurable filters based on standard PIN diodes switches. The obtained results are appealing and demonstrate the capabilities and potentialities of RF-MEMS to operate with the new communication standards that work at high microwave frequency bands.

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Section: Introductionmentioning

confidence: 99%

A Reconfigurable Pseudohairpin Filter Based on MEMS Switches

Donelli

Manekiya

Tagliapietra

et al. 2022

Sensors

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“…For RF MEMS, the large displacement could ensure effective isolation for the signal transformation for operation in the region of 10 GHz as reported in [10]. A variety of MEMS switches, including electrothermal [10], electrostatic [11], and electromagnetic [12,13,14,15,16,17,18,19,20], were reported. The electrothermal microswitch usually tends to respond slowly; as a result, its application is limited.…”

Section: Introductionmentioning

confidence: 99%

Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer

Miao

Dai

Huang

et al. 2016

Sensors

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This paper presents a bistable microswitch fully batch-fabricated on a single glass wafer, comprising of a microactuator, a signal transformer, a microspring and a permanent magnet. The bistable mechanism of the microswitch with large displacement of 160 μm depends on the balance of the magnetic force and elastic force. Both the magnetic force and elastic force were optimized by finite-element simulation to predict the reliable of the device. The prototype was fabricated and characterized. By utilizing thick laminated photoresist sacrificial layer, the large displacement was obtained to ensure the insulation of the microswitch. The testing results show that the microswitch realized the bistable mechanism at a 3–5 V input voltage and closed in 0.96 ms, which verified the simulation.

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“…1 (b) shows the schematic of the RF-MEMS switch. The RF-MEMS switch (OMRON, 2SMES-01) [6] [7] is mounted on Layer-2 of the substrate. Two resistances of 100 k are also mounted on Layer-2 to discharge the drive voltage.…”

Section: Introductionmentioning

confidence: 99%

Orthogonal linear polarization switchable slot-ring array antenna using RF-MEMS switch

Ushijima

Nishiyama

Aikawa

et al. 2012

2012 Asia Pacific Microwave Conference Proceedings

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An orthogonal linear polarization switchable slot-ring array antenna using an RF-MEMS switch is newly proposed and its characteristics are experimentally investigated. The proposed array antenna consists of a dual-polarized slotring array antenna and an RF-MEMS switch (OMRON, 2SMES-01) which has high isolation and low insertion loss characteristics. This array antenna can accurately switch ±45deg. orthogonal linear polarizations due to the characteristics of the RF-MEMS switch. Two layers of Teflon glass fiber substrate with the relative dielectric constant r of 2.15 and the thickness of 0.8×2 mm is used. In the measurement, ±45-deg. linear polarization switching and excellent cross-polarization suppression are obtained. Thus, the RF-MEMS switch is suitable for polarization switchable array antennas. The array antenna using an RF-MEMS switch is very promising in a wide variety of wireless application areas, such as radar systems and various kinds of RF sensors.

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Development of a large-force low-loss metal-contact RF MEMS switch

Cited by 45 publications

References 2 publications

A Reconfigurable Pseudohairpin Filter Based on MEMS Switches

A Reconfigurable Pseudohairpin Filter Based on MEMS Switches

Large Out-of-Plane Displacement Bistable Electromagnetic Microswitch on a Single Wafer

Orthogonal linear polarization switchable slot-ring array antenna using RF-MEMS switch

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