2005
DOI: 10.1063/1.1994921
|View full text |Cite
|
Sign up to set email alerts
|

Development of a geometrical evaluation apparatus for ultrahigh 100 GB optical disk masters

Abstract: We report on the development of a prototype system for the automatic characterization of the pit shape in optical master disks (OMDS) and its relationship with the corresponding optical readout signal. The system consists of two basic components: an optical disk drive tester (ODDT) which uses a laser beam pickup to convert physical pits on the master disk into electrical signals and an integrated atomic force microscope (AFM). In this system, the ODDT scans the OMD and records the positions of errors. Using th… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2005
2005
2013
2013

Publication Types

Select...
2
1

Relationship

1
2

Authors

Journals

citations
Cited by 3 publications
(1 citation statement)
references
References 12 publications
0
1
0
Order By: Relevance
“…The results are compared with actual images obtained by a scanning electron microscope (SEM). Although the proposed method is simple, the number of targets becomes countable, and one may return to the position of the detected target for further analyses [5]. of 12 cm and a thickness of 0.6 mm.…”
Section: Introductionmentioning
confidence: 99%
“…The results are compared with actual images obtained by a scanning electron microscope (SEM). Although the proposed method is simple, the number of targets becomes countable, and one may return to the position of the detected target for further analyses [5]. of 12 cm and a thickness of 0.6 mm.…”
Section: Introductionmentioning
confidence: 99%