Development of A Generic Microfluidic System for Electrochemical Immunoassay-Based Remote Bio/Chemical Sensors

Ahn, Chong H.; Henderson, Todd; Heineman, William R.; Halsall, Brian

doi:10.1007/978-94-011-5286-0_54

Cited by 20 publications

(9 citation statements)

References 8 publications

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“…Many actuation mechanisms, including thermal [1], electromagnetic [2], pneumatic [3], [4], and thermopneumatic [5], have been investigated for valve operations. It was found [5] that thermopneumatic actuation can provide large force through a long stroke.…”

Section: Introductionmentioning

confidence: 99%

Design, fabrication, and testing of micromachined silicone rubber membrane valves

Yang

Grosjean

Tai

1999

J. Microelectromech. Syst.

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Technologies for fabricating silicone rubber membranes and integrating them with other processes on silicon wafers have been developed. Silicone rubber has been found to have exceptional mechanical properties including low modulus, high elongation, and good sealing. Thermopneumatically actuated, normally open, silicone rubber membrane valves with optimized components have been designed, fabricated, and tested. Suspended silicon nitride membrane heaters have been developed for low-power thermopneumatic actuation. Composite silicone rubber on Parylene valve membranes have been shown to have low permeability and modulus. Also, novel valve seats were designed to improve sealing in the presence of particles. The valves have been extensively characterized with respect to power consumption versus flow rate and transient response. Low power consumption, high flow rate, and high pressure have been demonstrated. For example, less than 40 mW is required to switch a 1-slpm nitrogen flow at 33 psi. Water requires close to 100 mW due to the cooling effect of the liquid. [427]

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Section: Introductionmentioning

confidence: 99%

Design, fabrication, and testing of micromachined silicone rubber membrane valves

Yang

Grosjean

Tai

1999

J. Microelectromech. Syst.

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“…The design, fabrication, analyti- Bio-fi lter and bio-sensor cal chemistry, and concept of this system have been discussed previously. [4][5][6][7] The micro-reservoirs hold the different fl uids required for on-board detection and are bio-chemically compatible.…”

Section: Generic Micro-fluidic Systemmentioning

confidence: 99%

Modeling multilayered MEMS-based micro-fluidic systems

Bhansali

Benjamin

Upadhyay

et al. 2004

JOM

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This article describes the design, fabrication, and simulation of two micro-electromechanical systems-based micro-fl uidic systems. The fi rst system, a lab-on-a-chip, enables electrochemical immunoassay-based chemical/ biological detection. The second is a micro-fl uidic bio-impedance sensor. The relevance of fl uidic dynamics in micro-fl uidic channels is discussed in context of fl uid paths and misalignments in the channels that appear during multi-level structure integration. Also discussed is the effect of channel dimensions on the fl ow profi le and on performance within the micro-systems.

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“…Among all shape memory materials, Nitinol (Ni-Ti) shape memory alloys (SMAs) with their superior thermo-mechanical and thermo-electrical characteristics have found many applications in different fields of engineering and science [1]. A number of MEMS valves have been demonstrated using thermal [2], electromagnetic [3], pneumatic [4,5] and thermopneumatic actuation [6]. The potential for precise control of fluid flow on a small scale has motivated the development of micro valves and micro pumps using various technologies.…”

Section: Introductionmentioning

confidence: 99%

Investigation on Laser assisted actuation of shape memory alloy based micro-valve

Nath

Raut

Kumar

et al. 2015

2015 International Conference on Robotics, Automation, Control and Embedded Systems (RACE)

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This research highly focuses towards development of a Shape Memory Alloy based micro valve and actuation using LASER. Numerous Micro valve designs have been reported with a variety of actuation mechanisms such as piezoelectric, silicon rubber, etc. [1] , but the use of these micro valves have been limited. Here LASER is used as actuation medium because of noncontact type and low power energy density source.The micro valve is designed and fabricated to control small amounts of fluid flow of the order of µL/sec. Single way trained NiTi Shape Memory Alloy is used in this micro valve. EDX test and DSC test has been performed to get details of properties of NiTi SMA. In the LASER actuation work, detailed parametric studies have been performed by actuating the one way trained SMA at various Laser fluence, actuation time and spot diameter of Laser .Scanning Electron Microscope test has been performed to check for ablation. A micro-valve array for fluid flow control on macroscopic level is described. The micro-valve array is based on innovative design such that flow rate across micro-valve array can be varied with number of micro-valve opened with each micro-valve is laser actuated and spring returned.The actuation of SMA using LASER shows that the maximum deflection obtained for optimum LASER fluence of 25.48mJ/cm² is 7.29 mm, The flow measurement was performed using an air meter at pressure difference ranging from 1KPa to 5KPa with minimum rate of flow 325 µL/sec. Index Terms-Micro valve, Shape memory alloy (SMA), LaserActuation, Characterization I INTRODUCTIONA Shape memory alloys (SMAs) exhibit peculiar thermomechanical, thermo-electrical and thermo-chemical behaviors under mechanical, thermal, electrical and chemical conditions. Among all shape memory materials, Nitinol (Ni-Ti) shape memory alloys (SMAs) with their superior thermo-mechanical and thermo-electrical characteristics have found many applications in different fields of engineering and science [1]. A number of MEMS valves have been demonstrated using thermal [2], electromagnetic [3], pneumatic [4,5] and thermopneumatic actuation [6].The potential for precise control of fluid flow on a small scale has motivated the development of micro valves and micro pumps using various technologies. Such devices are potentially important in applications that include biomedical dosing, biochemical reaction systems, micro fluidic mixing and regulation. Normally opened valve allow flow when not actuated and obstruct flow when powered. The antithesis is true for normally closed valves, staying closed when not powered. Since micro valves typically operate under high pressures and controlled flow rates are desired, a strong and robust actuator that can generate required displacements is required. SMAs are excellent candidates for satisfying these criteria, and their use in micro valves will be discussed in detail here.In this work, LASER assisted actuation of SMA based micro-valve is investigated designed, fabricated, and tested. Such devices exhibit a linear scalable valve fu...

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Development of A Generic Microfluidic System for Electrochemical Immunoassay-Based Remote Bio/Chemical Sensors

Cited by 20 publications

References 8 publications

Design, fabrication, and testing of micromachined silicone rubber membrane valves

Design, fabrication, and testing of micromachined silicone rubber membrane valves

Modeling multilayered MEMS-based micro-fluidic systems

Investigation on Laser assisted actuation of shape memory alloy based micro-valve

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