Modeling multilayered MEMS-based micro-fluidic systems

Bhansali, Shekhar; Benjamin, Helen; Upadhyay, Vandana; Henderson, H. Thurman; Ahn, Chong H.; Okulan, N.; Oh, Kwang W.

doi:10.1007/s11837-004-0036-3

Cited by 2 publications

References 8 publications

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Characterization of Electrode/Electrolyte Interface of ECIS Devices

2012

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Electric cell‐substrate impedance sensing requires low electrode/electrolyte interface impedance for effective biomedical and biophysical applications. Thus a complete understanding of physical processes involved in the formation of an electric double layer is required to design a low interface impedance device. This paper presents the numerical simulation of the impedance for the electrode/electrolyte interface of three‐electrode devices along with the practical realization for the effective workout of impedance sensing devices. The three‐electrode based impedance sensing devices along with phosphate buffered saline as electrolyte is simulated using COMSOL Multiphysics to evaluate the impedance of the electrode/electrolyte interface. Microfabrication technology is used to realize three‐electrode impedance sensing devices with diverse configuration which are used to measure the electrode/electrolyte interface impedance. The measured impedance data were then compared with the COMSOL simulated results and it is found that both the data sets fitted well with less than 5 % RSE. The results obtained from simulation and experiments indicate that the impedance due to double layer diffusion dominates in the low frequency region up to few kHz whereas electrolytic bulk resistance plays a major role in the higher frequency range. The experimental impedance data were further interpreted by electrochemical impedance spectroscopy analysis software to model the equivalent circuit of the electrochemical system.

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