Development of a compact, fiber-coupled, six degree-of-freedom measurement system for precision linear stage metrology

Abstract

A compact, fiber-coupled, six degree-of-freedom measurement system which enables fast, accurate calibration, and error mapping of precision linear stages is presented. The novel design has the advantages of simplicity, compactness, and relatively low cost. This proposed sensor can simultaneously measure displacement, two straightness errors, and changes in pitch, yaw, and roll using a single optical beam traveling between the measurement system and a small target. The optical configuration of the system and the working principle for all degrees-of-freedom are presented along with the influence and compensation of crosstalk motions in roll and straightness measurements. Several comparison experiments are conducted to investigate the feasibility and performance of the proposed system in each degree-of-freedom independently. Comparison experiments to a commercial interferometer demonstrate error standard deviations of 0.33 μm in straightness, 0.14 μrad in pitch, 0.44 μradin yaw, and 45.8 μrad in roll.

Simultaneous Measurement of 6DOF Motion Errors of Linear Guides of CNC Machine Tools Using Different Modes

“…Relevant commercial interferometers produced by Renishaw, Keysight and JENAer are mostly used for single parameter measurement. With the increasing requirements for measurement efficiency, multiparameter simultaneous measurement systems based on the principle of laser collimation [ 7 , 8 , 9 , 10 ] or the combination of collimation and interference [ 11 , 12 , 13 , 14 , 15 , 16 , 17 , 18 ] continue to emerge, and have become the current research trend. Although, multiparameter simultaneous measurement systems have improved efficiency compared to single-parameter measurement systems, in actual measurement, it is often necessary to adjust the installation positions of the measurement head and the target mirror according to the machine tool types.…”

“…However, based on this installation method, there are two different measurement modes in the measurement process due to the different types of machine tools. In general, the default measurement mode is the fixed measurement head, and the target mirror moves with the worktable or spindle [ 9 , 10 , 13 , 17 , 18 , 21 ]. This measurement mode is called measurement mode 1 in this paper.…”

Embedded Sensor System for Five-degree-of-freedom Error Detection on Machine Tools

“…Chen developed a 2-beam 6-DOF measurement system based on a straightness interferometer with rotational error compensation. Gillmer and Yu [14][15][16] developed a single beam 6-DOF measurement system based on Polarization Optics and wavefront aberration effects.…”

Design of a Measurement System for Simultaneously Measuring Six-Degree-Of-Freedom Geometric Errors of a Long Linear Stage

“…Therefore, it is a time-consuming work to completely measure all geometric motion errors of the linear precision stage using the laser interferometer [ 7 , 11 , 12 ]. In recent years, some measurement systems for simultaneously measuring multi-DOF geometric motion errors of a long linear stage of a machine tool have been developed in the literature [ 13 , 14 , 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 , 27 , 28 , 29 , 30 , 31 ]. For example, for contact measurement, Mura proposed a novel measurement device, consisting of six displacement sensors mounted as a parallel mechanism based on the Stewart theory.…”