2010 IEEE 23rd International Conference on Micro Electro Mechanical Systems (MEMS) 2010
DOI: 10.1109/memsys.2010.5442331
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Development of a 3D distributed carbon nanotubes on flexible polymer for normal and shear forces measurement

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Cited by 5 publications
(7 citation statements)
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“…This study extends the previous patterning 3D CNT process [26] and CNT-based flexible tactile sensor technology [22] to establish the fabrication processes illustrated in figure 3. Therefore, the patterned CNT sensing elements and metal routings can be implemented on the flexible-polymer substrate with tactile bump and further integrated with the FPC.…”
Section: Fabrication and Resultssupporting
confidence: 68%
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“…This study extends the previous patterning 3D CNT process [26] and CNT-based flexible tactile sensor technology [22] to establish the fabrication processes illustrated in figure 3. Therefore, the patterned CNT sensing elements and metal routings can be implemented on the flexible-polymer substrate with tactile bump and further integrated with the FPC.…”
Section: Fabrication and Resultssupporting
confidence: 68%
“…Thus, the presented process successfully transferred patterned CNTs and metal routings, and packaged the FPC connector into the flexible polymer substrate. In comparison, the electrical routings in [22] were directly deposited on the PDMS substrate after the de-molding process. Due to poor adhesion between the metal and the PDMS, the crack and delamination problem would easily occur.…”
Section: Fabrication and Resultsmentioning
confidence: 99%
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“…Percolative composites: percolative composites are formed by dispersed conductive fillers such as carbon black (CB) [57], [58], graphite [59], [60] and carbon nanotubes (CNTs) [61], [62] within an insulating matrix. The conductivity of percolative composites will be altered when a pressure is applied.…”
Section: Piezoresistive Sensorsmentioning
confidence: 99%
“…In order to mimic the tactile capability of the human finger, many types of tactile sensors have been developed based on various transduction techniques, e.g., capacitive, piezoresistive, piezoelectric, inductive and optical techniques [61], [81], [143], [144] .…”
Section: Introductionmentioning
confidence: 99%