2008
DOI: 10.1109/tmech.2008.918483
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Development and Experimental Analysis of a Soft Compliant Tactile Microsensor for Anthropomorphic Artificial Hand

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Cited by 103 publications
(42 citation statements)
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“…Except Beccai et al [11], who report some slip detection results with a tactile device for an artificial hand, very little results have been published on the use of three-axial MEMS force sensor in artificial tactile sensing experiments. On the basis of Yao's model [12], CEA-LETI is producing one of these innovative sensors as individual elements and as arrays of 10 × 1 and 10 × 3 elements.…”
Section: Introductionmentioning
confidence: 99%
“…Except Beccai et al [11], who report some slip detection results with a tactile device for an artificial hand, very little results have been published on the use of three-axial MEMS force sensor in artificial tactile sensing experiments. On the basis of Yao's model [12], CEA-LETI is producing one of these innovative sensors as individual elements and as arrays of 10 × 1 and 10 × 3 elements.…”
Section: Introductionmentioning
confidence: 99%
“…In [56], an embedded tri-axial silicon based piezoresistor sensor is bonded to a flex PCB, and the resulting package is encapsulated in polyurethane. The complete sensor package has diameter of 3 mm and a sensitivity of 0.1 V/N and 0.4 V/N for normal and shear forces, respectively.…”
Section: Micromachined Piezoresistorsmentioning
confidence: 99%
“…It has been shown that MEMS based tactile sensors can be designed and built with a 3D structure that can adequately be packaged with skin like polymeric materials so that the sensor and soft packaging become a new tactile sensible element like the Soft and Compliant Tactile Micro sensor reported in [12].MEMS sensor array and electronics for integration in a robotic finger is as shown in Figure 1. The Sensor has been mounted on a forefinger.…”
Section: A Mems Sensormentioning
confidence: 99%