Development and evaluation of 193nm immersion generation-three fluid candidates

Abstract

The need to extend 193nm immersion lithography necessitates the development of a third generation (Gen-3) of high refractive index (RI) fluids that will enable approximately 1.7 numerical aperture (NA) imaging. A multipronged approach was taken to develop these materials. One approach investigated the highest-index organic thus far discovered. The second approach used a very high refractive index nanoparticle to make a nanocomposite fluid.This report will describe the chemistry of the best Gen-3 fluid candidates and the systematic approach to their identification and synthesis. Images obtained with the Gen-3 fluid candidates will also be presented for a NA≥ 1.7

High index 193 nm immersion lithography: the beginning or the end of the road

“…Consequently the SEMATECH work focused on HfO 2 which made the task only slightly simpler. The RI of HfO 2 was measured to be approximately 2.90 at 193 nm, 24 a value that is consistent with the RI value of HfO 2 in the literature. 25 Additionally, the UV cutoff for the material is about 225 nm for the bulk, requiring a small blue-shift in the UV order for HfO 2 to be useful.…”

Nonradiative Deactivation of Singlet Oxygen (1O2) by Cubane and Its Derivatives

“…After its initial synthesis in 1964, it was clear that pentacyclo[4.2.0.0 2,5 .0 3,8 .0 4,7 ]octane, also termed cubane, might find numerous uses because of its novel geometric structure . To date, cubane and its derivatives have shown potential for application as high energy fuels and explosives; as new novel materials, synthetic intermediates, and polymers; and as high refractive index fluids for immersion lithography due to high electron densities . Here, the cubane skeleton is used as an example of a highly strained hydrocarbon backbone with which to examine the nonradiative deactivation of an excited-state species.…”

High-Index Immersion Lithography

“…This type of G3 fluids has not yet met the requirements of refractive index or absorbance. The other types of G3 fluids, which include nanoparticles, are being developed, but they are still within the research phase (Zimmerman et al, 2008). In the above situation, an immersion system using a G2 fluid has been preferentially developed .…”