Development and Characterization of a Piezoelectrically Actuated MEMS Digital Loudspeaker

Dejaeger, Rémy; Casset, F.; Desloges, B.; Rhun, G. Le; Pierpoint, Robert; Fanget, S.; Leclère, Quentin; Ege, Kerem; Guyader, Jean‐Louis

doi:10.1016/j.proeng.2012.09.114

Cited by 15 publications

(5 citation statements)

References 3 publications

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“…The acoustic pressure measured using a microphone placed 13 cm face to the MEMS-DLA is reported in Fig. 6 and compared with the same measurements performed on a 64-membranes MEMS-DLA with speaklets radius of 800 μm from previous works (Dejaeger et al (2012)). Results show an acoustic pressure increased of about 40 dB that can be explained by the increase of the emitting surface: higher number of speaklets (+ 8 dB) and a higher speaklets size (+12 dB).…”

Section: Characterizations and Resultsmentioning

confidence: 84%

Low Voltage MEMS Digital Loudspeaker Array Based on Thin-film PZT Actuators

et al. 2015

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This paper reports on the development of a Digital Loudspeaker Array (DLA) solution based on Pb(Zr 0.52 ,Ti 0.48 )O 3 (PZT) thinfilm actuated membranes. These membranes called speaklets are arranged in a matrix and operate in a binary manner by emitting short pulses of sound pressure. Using the principle of additivity of pressures in the air, it is possible to reconstruct audible sounds. For the first time, electromechanical and acoustic characterizations are reported on a 256-MEMS-membranes DLA. Sounds audible as far as several meters from the loudspeaker have been generated using low voltage (8V).

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Section: Characterizations and Resultsmentioning

confidence: 84%

Low Voltage MEMS Digital Loudspeaker Array Based on Thin-film PZT Actuators

et al. 2015

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“…In piezoelectric MEMS loudspeakers, a cantilever is excited by a piezoelectric layer sandwiched between two electrodes in the presence of the input alternating current (AC) voltage. These loudspeakers are becoming more popular because they require only a low voltage to provide a high actuation force [3] and are insensitive to dust [4].…”

Section: Introductionmentioning

confidence: 99%

A validated modeling strategy for piezoelectric MEMS loudspeakers including viscous effects

Guilvaiee

Heyes²,

Novotny³

et al. 2023

Acta Acust.

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Piezoelectric micro-electro-mechanical system (MEMS) loudspeakers are drawing more interest due to their applications in new-developing audio technologies. MEMS devices’ small dimensions necessitate including thermal and viscous effects in the surrounding air when simulating their behaviors. Thus, the linearized mass, momentum and energy conservation equations are used to describe these effects. These formulations are implemented in our open-source finite element program openCFS. In this article, we model a 3D piezoelectric MEMS loudspeaker in two configurations: open and closed back-volume, which behave differently due to the effects of air viscosity and pressure forces between the cantilever and the closed back-volume. Furthermore, using a customized vacuum chamber, the atmospheric pressure is varied and its effects are studied in these two configurations, numerically and experimentally. Experimental results prove that our model predicts the behavior of the piezoelectric MEMS loudspeaker in various configurations very well. Additional simulations illustrate the effect of the slit thickness and thermal losses.

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“…Manufacturing such systems is difficult, but planar technologies such as thin film or even thick film are candidates as it is suitable for making numerous, small and identical structures. For example, Dejaeger et al and Casset et al [2] [3]. developed a DLA with 256 Lead Zirconate Titanate (PZT) -based speaklets.…”

Section: Introductionmentioning

confidence: 99%

A study of efficient speaklet driving mechanisms for use in a digital loudspeaker array based on PZT actuators

Monkronthong

White

Harris

2016

2016 IEEE Sensors Applications Symposium (SAS)

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Abstract-The concept of a Digital Loudspeaker Array (DLA) requires a driving signal for a speaklet (tiny loudspeaker) with a short rectangle pulse. The speaklet takes the form of a diaphragm, which vibrates freely and emits acoustic energy at its resonant frequency. This study gives a guideline for the design of PZT speaklets for assigning the required resonant frequency and maximizing the amplitude of the acoustic response. The speaklet consists of three layers; a diaphragm, an active PZT layer, and a bottom electrode. The device is simulated with Comsol Multiphysics. From the simulation, the first resonant frequency mainly depends on diaphragm diameter and thickness while the maximum displacement is related to thickness of the three layer structure. Additionally, this study verifies the concept of a multiple-level DLA that can produce an acoustic signal with a linear relationship between its amplitude and the driving pulse width. This result allows a more flexible design of DLA as the limitation of one bit of resolution per speaklet is removed, allowing designs with a reduced number of speaklets.

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Development and Characterization of a Piezoelectrically Actuated MEMS Digital Loudspeaker

Cited by 15 publications

References 3 publications

Low Voltage MEMS Digital Loudspeaker Array Based on Thin-film PZT Actuators

Low Voltage MEMS Digital Loudspeaker Array Based on Thin-film PZT Actuators

A validated modeling strategy for piezoelectric MEMS loudspeakers including viscous effects

A study of efficient speaklet driving mechanisms for use in a digital loudspeaker array based on PZT actuators

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