“…Self-diffusion is a fundamental matter transport process in solids, playing a dominant role in the preparation, processing, and application of various materials. 1 The determination of self-diffusivities on very short length scales of ∼1 nm is important to understand the transport properties of nanostructured 2 and metastable materials 3,4 as well as of thin films, 5,6 especially at low temperatures. 7 Neutron reflectometry (NR) is a reliable method to measure diffusion length on the (sub)nanometer scale, as demonstrated for metallic, 2,6 intermetallic, 10,11 semiconducting, 7,9 and ceramic [3][4][5] thin films.…”