Determination of the vibrational, rotational and electron temperatures in N₂and Ar–N₂rf discharge

Abstract

In order to characterize a nonequilibrium molecular plasma from the point of view of translational, vibrational and rotational degrees of freedom and their interaction, the characteristic temperatures of such a plasma were measured in an ICP rf reactor. Both pure nitrogen and argon–nitrogen mixture plasmas were examined for this purpose.The experimental results of rotational (Tr), vibrational (Tv) and electron (Te) temperatures are presented. Vibrational and rotational temperatures were measured as a function of nitrogen content for both E and H modes of ICP discharge using a power range of 45–200 W and pressure range of 2.6–13.3 Pa. Additionally, the pressure dependence of electron temperature in a pure nitrogen discharge was studied. Results show that rotational temperature is ≈370 K for E mode and ≈470 K for H mode and almost does not depend on either the applied rf power or the nitrogen content in the discharge. Vibrational temperature groups in the range 5000–12 000 K increase with applied rf power and constantly decay with an increase of nitrogen content. The measured values and behaviour of electron temperature are comparable with those for the positive column of the dc glow discharge. The results also prove that these three temperatures obey the classical inequality Te > Tv > Tr, as well as clarifying the differences in both vibrational and rotational temperature for different modes of the ICP discharge.

Flame Front Propagation in an Optical GDI Engine under Stoichiometric and Lean Burn Conditions

“…Other OH lines (such as the band at 314 nm) were too weak to be detected in all the cases. Moreover, the emission due to the N2 transition C 3 Πu → Β 3 Πg [42, 45,46] resulted sufficiently intense to interfere with the CN (0, 0) band. An emission band around 336 nm due to the NH Α 2 Σ + → The glow phase featured radiative emissions of CN and OH radicals [41][42][43][44].…”

“…Other OH lines (such as the band at 314 nm) were too weak to be detected in all the cases. Moreover, the emission due to the N2 transition C 3 Πu → Β 3 Πg [42, 45,46] The glow phase featured radiative emissions of CN and OH radicals [41][42][43][44]. As shown in Figure 11, only the highest emission band of the CN violet system B 2 Σ + → X 2 Σ + at 388 nm were resolved for both cases.…”

“…Other OH lines (such as the band at 314 nm) were too weak to be detected in all the cases. Moreover, the emission due to the N 2 transition C 3 Π u → B 3 Π g [42,45,46] resulted sufficiently intense to interfere with the CN (0, 0) band. An emission band around 336 nm due to the Energies 2017, 10, 1337 13 of 23 NH A 2 Σ + → X 2 Π electronic transition was also observed, but the intensity resulted too low for the retrieving procedure.…”

A simple temperature evaluation in high-pressure magnetron sputtering plasma using optical emission spectroscopy (OES) technique

“…The rotational temperature can be calculated using formula after some correlation of data has been done. The formula that proposed by N.Britun et al for his previous works [9]. The rotational temperature, Trot is given by…”

A Spectroscopic Study on Argon-Ammonia Water Gaseous Plasma Super-hydrophilizing Polytetrafluoroethylene

“…2 (b)). N 2 plasma temperature including electron temperature (T e ), vibrational temperature (T v ), and rotational temperature (T r ) were calculated by some methods based on Boltzmann distribution [8]. The plasma temperature decreased as working pressure increased ( Fig.…”