Determination of the transfer function for optical surface topography measuring instruments—a review

Foreman, Matthew R.; Giusca, Claudiu; Coupland, John N.; Török, Péter; Leach, Richard

doi:10.1088/0957-0233/24/5/052001

Cited by 37 publications

(23 citation statements)

References 168 publications

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“…Alternatively, there are schemes for measuring the impulse response directly. [12][13][14] In conclusion, we have demonstrated that PSI can be used to measure the radius of cylindrical nanowires with nominal radii of 25 nm and 50 nm to within 4% of their nominal value. This relies on calibration of the experimental optical phase measurements to the results of a theoretical wave-optic model of the imaging of the nanowire by the PSI, modified to account for geometric shadowing due to the nanowire.…”

mentioning

confidence: 61%

Phase-stepping interferometry of GaAs nanowires: Determining nano-wire radius

Little

Kuruwita

Joyce

et al. 2013

Applied Physics Letters

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Phase stepping interferometry is used to measure the size of near-cylindrical nanowires. Nanowires with nominal radii of 25 nm and 50 nm were used to test this by comparing specific measured optical phase profile values with theoretical values calculated using a wave-optic model of the Phase stepping interferometry (PSI) system. Agreement within 10% was found, which enabled nanowire radii to be predicted within 4% of the nominal value. This demonstration highlights the potential capability for phase stepping interferometry to characterize single nanoparticles of known geometry in the optical far-field. V

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mentioning

confidence: 61%

Phase-stepping interferometry of GaAs nanowires: Determining nano-wire radius

Little

Kuruwita

Joyce

et al. 2013

Applied Physics Letters

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“…In order to understand the errors associated with CSI and other optical instruments it is useful to determine their 3D transfer characteristics [11,12]. In a recent work, the process of scattering from the smooth interface between homogenous materials was considered, and it was shown that, with appropriate assumptions, CSI can be described by a 3D filtering operation [13].…”

Section: Introductionmentioning

confidence: 99%

Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics

et al. 2014

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When applied to the measurement of smooth surfaces, coherence scanning interferometry can be described by a three-dimensional linear filtering operation that is characterized either by the point-spread function in the space domain or equivalently by the transfer function (TF) in the spatial frequency domain. For an ideal, aberration-free instrument, these characteristics are defined uniquely by the numerical aperture of the objective lens and the bandwidth of the illumination source. In practice, however, physical imperfections such as those in lens aberrations, reference focus, and source alignment mean that the instrument performance is not ideal. Currently, these imperfections often go unnoticed as the instrument performance is typically only verified using rectilinear artifacts such as step heights and lateral grids. If an object of varying slope is measured, however, significant errors are often observed as the surface gradient increases. In this paper, a new method of calibration and adjustment using a silica micro-sphere as a calibration artifact is introduced. The silica microsphere was used to compute the point-spread and TF characteristics of the instrument, and the effect of these characteristics on instrument performance is discussed. Finally, a straightforward method to correct for phase and amplitude imperfections in the TF is described using a modified inverse filter.

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“…In the non-contact measurement of the surface profile, the phase shifting interferometry [6][7][8][9][10][11] requires multiple fringe patterns to reconstruct the surface profile of an object.…”

Section: Introductionmentioning

confidence: 99%

Automatic optical inspection system for 3D surface profile measurement of multi-microlenses using the optimal inspection path

Yang¹,

Lin²

2014

Meas. Sci. Technol.

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In this paper, an automatic optical inspection system is proposed for measuring the three-dimensional surface profile of multi-microlenses according to the optimal inspection path. The proposed system is applicable for full and sampling inspection of microlens arrays, and has the following contributions: (1) the optimal inspection path of sampling inspection is derived by a Genetic Algorithm considering the acceleration characteristic of the XY-table. (2) The incomplete microlens fringe is removed, and the center of each microlens can be automatically positioned. (3) The phase difference of each neighboring pixel is calculated through the concept of sign reversal in order to rebuild the surface profile. According to the experimental results, the lens sag of microlenses in different sizes can be correctly measured by the proposed system, and a relative error of 3.4% (max) can be achieved. Compared with other methods, the positioning time of the proposed method is shortened by 10% to 30%, validating the practicability of this system.

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Determination of the transfer function for optical surface topography measuring instruments—a review

Cited by 37 publications

References 168 publications

Phase-stepping interferometry of GaAs nanowires: Determining nano-wire radius

Phase-stepping interferometry of GaAs nanowires: Determining nano-wire radius

Coherence scanning interferometry: measurement and correction of three-dimensional transfer and point-spread characteristics

Automatic optical inspection system for 3D surface profile measurement of multi-microlenses using the optimal inspection path

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