2005
DOI: 10.1088/0268-1242/20/5/008
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Determination of the Mn concentration in GaMnAs

Abstract: Three series of 1 µm thick Ga 1−x Mn x As films with different Mn composition have been characterized using high-resolution x-ray diffraction (HRXRD). The results show that they are highly-crystalline and the growth is reproducible. The Mn compositions have also been measured by other popular methods: in situ ion gauge, x-ray fluorescence (XRF), electron probe microanalysis (EPMA) and secondary ion mass spectrometry (SIMS). The results show that the Mn concentrations measured by different methods are different… Show more

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Cited by 23 publications
(11 citation statements)
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“…A detailed comparison of the results of a number of different calibration techniques, presented in Ref. 62, allows us to assign an uncertainty of ±10% to the quoted Mn concentrations. However, it should be noted that the SIMS measurements yield the total volume density of Mn in the ͑Ga,Mn͒As films, and not the fraction of Ga substituted by Mn.…”
Section: Experiments a Measured Curie Temperatures And Hole Densmentioning
confidence: 99%
“…A detailed comparison of the results of a number of different calibration techniques, presented in Ref. 62, allows us to assign an uncertainty of ±10% to the quoted Mn concentrations. However, it should be noted that the SIMS measurements yield the total volume density of Mn in the ͑Ga,Mn͒As films, and not the fraction of Ga substituted by Mn.…”
Section: Experiments a Measured Curie Temperatures And Hole Densmentioning
confidence: 99%
“…In LT-MBE grown GaMnAs on GaAs there exists one additional peak for lower l which represents the larger lattice parameter of GaMnAs. 41 After implantation and PLA the inhomogeneous Mn distribution leads to a XRD ͑004͒ reflection which continuously changes between l = 3.98 and 4.00. After ten pulses the probed additional overcompensation represents an increasing imperfection of the lattice.…”
Section: Hr-xrdmentioning
confidence: 99%
“…However, the growth of dilute magnetic semiconductors [11] or of non-stoichiometric GaAs for ultrafast photoconductive devices [12] requires substrate temperatures below 300 1C. In order to avoid systematic errors, it is essential that a reproducible measurement can be performed routinely over a temperature range from 200 to 660 1C without realigning optical components or switching from one measurement technique to another.…”
Section: Temperature Measurement On Undoped Substratesmentioning
confidence: 99%