2016
DOI: 10.1016/j.matdes.2016.06.003
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Determination of the elastic moduli and residual stresses of freestanding Au-TiW bilayer thin films by nanoindentation

Abstract: In this paper, we present a detailed mechanical characterization of freestanding bilayer (Au-TiW) micro-cantilevers and double clamped beams, for applications as Radio Frequency (RF)-switches Micro-Electromechanical Systems (MEMS). The testing structures have been characterized by an optical profilometer and Scanning Electron Microscopy (SEM) equipped with Energy Dispersive X-ray Spectroscopy (EDS), in order to acquire information about their geometries, composition, and the gap between the substrate underneat… Show more

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Cited by 80 publications
(54 citation statements)
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“…The pile-up and sink-in effect can be revised by scanning electron microscope (SEM) on the residual indents [27]. Many methods have been developed to estimate surface residual stress [28][29][30]. Compared with the hardness of the unirradiated region, the hardness of regions irradiated with Ar ion irradiation at 200 and 700 °C to 10 dpa increased to about 1 and 1.5 GPa, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…The pile-up and sink-in effect can be revised by scanning electron microscope (SEM) on the residual indents [27]. Many methods have been developed to estimate surface residual stress [28][29][30]. Compared with the hardness of the unirradiated region, the hardness of regions irradiated with Ar ion irradiation at 200 and 700 °C to 10 dpa increased to about 1 and 1.5 GPa, respectively.…”
Section: Methodsmentioning
confidence: 99%
“…The improvement of mechanical properties may be related to the residual stress and fracture toughness at the interface between the Al2O3 and the Al matrix. However, it is very difficult to measure the residual stress and fracture toughness at the interface between the Al2O3 and the Al matrix, and it could be helpful to employ nanoindentation and pillar splitting techniques as reported by Matteo Ghidelli et al [39,40].…”
Section: Influence Of Stirring Temperature and Stirring Time On Mechamentioning
confidence: 99%
“…For example, Ghidelli et al [25] evaluated the elastic moduli on thin films considering the effect of residual stress. However, when the residual stress varies with time, as in fatigue crack growth, evaluation of the effects of residual stress often involves complicated stress analysis.…”
Section: Difference In the Fcg Behavior Between Short Surface Cracks mentioning
confidence: 99%