Determination of Parameters of Surface Acoustic Wave Vibration Sensors with the Help of Gravitational Field

Filipiak, J.; Steczko, G.

doi:10.12693/aphyspola.124.410

Cited by 1 publication

(1 citation statement)

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“…All these SAW-based sensors work on the basis of measuring changes in the delay time or velocity of a surface wave due to the impact of a physical quantity being measured on the SAW propagation. For vibration sensing utilizing SAW technology, Filipiak et al present some feasibility studies on such issue [ 8 – 10 ]. A prototype of SAW based vibration sensor with beam structure was developed for electronic warning system, and it was composed of a piezoelectric ST-cut quartz cantilever beam with a SAW delay line pattern fabricated on top of the beam surface and an aggregated mass attached on undamped end of the beam.…”

Section: Introductionmentioning

confidence: 99%

A Novel Wireless and Temperature-Compensated SAW Vibration Sensor

Wang

Xue

Huang

et al. 2014

Sensors

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A novel wireless and passive surface acoustic wave (SAW) based temperature-compensated vibration sensor utilizing a flexible Y-cut quartz cantilever beam with a relatively substantial proof mass and two one-port resonators is developed. One resonator acts as the sensing device adjacent to the clamped end for maximum strain sensitivity, and the other one is used as the reference located on clamped end for temperature compensation for vibration sensor through the differential approach. Vibration directed to the proof mass flex the cantilever, inducing relative changes in the acoustic propagation characteristics of the SAW travelling along the sensing device, and generated output signal varies in frequency as a function of vibration. A theoretical mode using the Rayleigh method was established to determine the optimal dimensions of the cantilever beam. Coupling of Modes (COM) model was used to extract the optimal design parameters of the SAW devices prior to fabrication. The performance of the developed SAW sensor attached to an antenna towards applied vibration was evaluated wirelessly by using the precise vibration table, programmable incubator chamber, and reader unit. High vibration sensitivity of ∼10.4 kHz/g, good temperature stability, and excellent linearity were observed in the wireless measurements.

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Section: Introductionmentioning

confidence: 99%