Determination of optical properties of a-SiO<sub>x</sub>N<sub>y</sub> thin films by ellipsometric and UV-visible spectroscopies

Rebib, Farida; Tomasella, Éric; Gaston, Jean-Paul; Eypert, C.; Cellier, J.; Jacquet, Michel

doi:10.1088/1742-6596/100/8/082033

Cited by 14 publications

(10 citation statements)

References 11 publications

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“…BME Frontiers [34,35], while the thermal-optic coefficients are largely independent of stoichiometry [26]. The measured elemental ratios for SiO x and SiN y used in this work are Si 37% and O 63% and Si 53.8%, N 43.8%, and O 2.4%, respectively.…”

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confidence: 87%

Bioresorbable Multilayer Photonic Cavities as Temporary Implants for Tether-Free Measurements of Regional Tissue Temperatures

et al. 2021

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Objective and Impact Statement. Real-time monitoring of the temperatures of regional tissue microenvironments can serve as the diagnostic basis for treating various health conditions and diseases. Introduction. Traditional thermal sensors allow measurements at surfaces or at near-surface regions of the skin or of certain body cavities. Evaluations at depth require implanted devices connected to external readout electronics via physical interfaces that lead to risks for infection and movement constraints for the patient. Also, surgical extraction procedures after a period of need can introduce additional risks and costs. Methods. Here, we report a wireless, bioresorbable class of temperature sensor that exploits multilayer photonic cavities, for continuous optical measurements of regional, deep-tissue microenvironments over a timeframe of interest followed by complete clearance via natural body processes. Results. The designs decouple the influence of detection angle from temperature on the reflection spectra, to enable high accuracy in sensing, as supported by in vitro experiments and optical simulations. Studies with devices implanted into subcutaneous tissues of both awake, freely moving and asleep animal models illustrate the applicability of this technology for in vivo measurements. Conclusion. The results demonstrate the use of bioresorbable materials in advanced photonic structures with unique capabilities in tracking of thermal signatures of tissue microenvironments, with potential relevance to human healthcare.

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confidence: 87%

Bioresorbable Multilayer Photonic Cavities as Temporary Implants for Tether-Free Measurements of Regional Tissue Temperatures

et al. 2021

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“…SiO x N y thin films of varying oxygen and nitrogen ratios can be grown by using, e.g. chemical vapor deposition (CVD) [33,34], laser ablation [35], plasma nitridation [36,37], ion-assisted deposition [38] and sputtering [27,[39][40][41][42][43][44].…”

Section: Introductionmentioning

confidence: 99%

“…In the magnetron sputtering process, silicon oxynitride thin films are usually deposited using a mixture of argon, nitrogen and oxygen [39,41,42,44]. Recently, Hänninen et al [24] reported the preparation of SiO x N y thin films by magnetron sputtering using nitrous oxide as a single-source precursor.…”

Section: Introductionmentioning

confidence: 99%

Synthesis and characterization of the mechanical and optical properties of Ca-Si-O-N thin films deposited by RF magnetron sputtering

Ali

Paul

Magnusson

et al. 2017

Surface and Coatings Technology

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Ca-Si-ON thin films were deposited on commercial soda-lime silicate float glass, silica wafers and sapphire substrates by RF magnetron co-sputtering from Ca and Si targets in an Ar/N 2 /O 2 gas mixture. Chemical composition, surface morphology, hardness, reduced elastic modulus and optical properties of the films were investigated using X-ray photoelectron spectroscopy, scanning electron microscopy, nanoindentation, and spectroscopic ellipsometry. It was found that the composition of the films can be controlled by the Ca target power, predominantly, and by the reactive gas flow. Thin films in the Ca-Si-ON system are composed of N and Ca contents up to 31 eq. % and 60 eq. %, respectively. The films thickness ranges from 600 to 3000 nm and increases with increasing Ca target power. The films surface roughness varied between 2 and 12 nm, and approximately decreases with increasing power of Ca target. The hardness (4-12 GPa) and reduced elastic modulus (65-145 GPa) of the films increase and decrease with the N and Ca contents respectively. The refractive index (1.56-1.82) is primarily dictated by the N content. The properties are compared with findings for bulk glasses in the Ca-Si-(Al)-ON systems, and it is concluded that Ca-Si-ON thin films have higher values of hardness, elastic modulus and refractive index than bulk glasses of similar composition.

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“…Therefore, the method makes it possible to determine the parameters for which a model describing the reflectance spectra of the film system must be built in order to theoretically obtain the values of ψ and ∆. Then, the optical parameters of the individual layers are deduced from fitting the experimental and modelled data [28]. The spectra of ψ and ∆ were measured using variable angle spectroscopic ellipsometry (VASE; J.A.…”

Section: Methodsmentioning

confidence: 99%

Controlling the Transverse Magneto-Optical Kerr Effect in Cr/NiFe Bilayer Thin Films by Changing the Thicknesses of the Cr Layer

et al. 2020

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Here, we demonstrate the impact of ferromagnetic layer coating on controlling the magneto-optical response. We found that the transverse magneto-optical Kerr effect (TMOKE) signal and TMOKE hysteresis loops of Ni80Fe20 thin layers coated with a Cr layer show a strong dependence on the thickness of the Cr layer and the incidence angle of the light. The transmission and reflection spectra were measured over a range of incidence angles and with different wavelengths so as to determine the layers’ optical parameters and to explain the TMOKE behavior. The generalized magneto-optical and ellipsometry (GMOE) model based on modified Abeles characteristic matrices was used to examine the agreement between the experimental and theoretical results. A comprehensive theoretical and experimental analysis reveals the possibility to create a TMOKE suppression/enhancement coating at specific controllable incidence angles. This has potential for applications in optical microscopy and sensors.

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Determination of optical properties of a-SiO_xN_y thin films by ellipsometric and UV-visible spectroscopies

Cited by 14 publications

References 11 publications

Bioresorbable Multilayer Photonic Cavities as Temporary Implants for Tether-Free Measurements of Regional Tissue Temperatures

Bioresorbable Multilayer Photonic Cavities as Temporary Implants for Tether-Free Measurements of Regional Tissue Temperatures

Synthesis and characterization of the mechanical and optical properties of Ca-Si-O-N thin films deposited by RF magnetron sputtering

Controlling the Transverse Magneto-Optical Kerr Effect in Cr/NiFe Bilayer Thin Films by Changing the Thicknesses of the Cr Layer

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Determination of optical properties of a-SiOxNy thin films by ellipsometric and UV-visible spectroscopies

Cited by 14 publications

References 11 publications

Bioresorbable Multilayer Photonic Cavities as Temporary Implants for Tether-Free Measurements of Regional Tissue Temperatures

Bioresorbable Multilayer Photonic Cavities as Temporary Implants for Tether-Free Measurements of Regional Tissue Temperatures

Synthesis and characterization of the mechanical and optical properties of Ca-Si-O-N thin films deposited by RF magnetron sputtering

Controlling the Transverse Magneto-Optical Kerr Effect in Cr/NiFe Bilayer Thin Films by Changing the Thicknesses of the Cr Layer

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Determination of optical properties of a-SiO_xN_y thin films by ellipsometric and UV-visible spectroscopies