Detection of O3 and NH3 using hybrid tin dioxide/carbon nanotubes sensors: Influence of materials and processing on sensor's sensitivity

Ghaddab, Bouthéina; Sanchez, Jean-Baptiste; Mavon, Christophe; Paillet, Matthieu; Parret, Romain; Zahab, A.; Bantigniès, Jean-Louis; Flaud, Valérie; Bêche, Eric; Berger, Franck

doi:10.1016/j.snb.2011.01.044

Cited by 41 publications

(35 citation statements)

References 28 publications

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“…Many studies have demonstrated that more abundant metal oxides can be good candidates for replacing noble metals in designing sensor materials. Both n‐type (SnO 2 , TiO 2 , ZnO, and WO 3 ) and p‐type metal oxides (Co 3 O 4 and CuO) have been shown to contribute to the room‐temperature sensing abilities of CNTs, while SnO 2 seems to be the most investigated material.…”

Section: Materials For Gas Sensing21single‐element Materialsmentioning

confidence: 99%

Nanostructured Materials for Room‐Temperature Gas Sensors

et al. 2015

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Sensor technology has an important effect on many aspects in our society, and has gained much progress, propelled by the development of nanoscience and nanotechnology. Current research efforts are directed toward developing high-performance gas sensors with low operating temperature at low fabrication costs. A gas sensor working at room temperature is very appealing as it provides very low power consumption and does not require a heater for high-temperature operation, and hence simplifies the fabrication of sensor devices and reduces the operating cost. Nanostructured materials are at the core of the development of any room-temperature sensing platform. The most important advances with regard to fundamental research, sensing mechanisms, and application of nanostructured materials for room-temperature conductometric sensor devices are reviewed here. Particular emphasis is given to the relation between the nanostructure and sensor properties in an attempt to address structure-property correlations. Finally, some future research perspectives and new challenges that the field of room-temperature sensors will have to address are also discussed.

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Section: Materials For Gas Sensing21single‐element Materialsmentioning

confidence: 99%

Nanostructured Materials for Room‐Temperature Gas Sensors

et al. 2015

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“…[7][8][9] Our work utilizes Atomic Layer Deposition of SnO 2 to tailor film thickness to twice the Debye length which has been shown to provide maximum sensitivity due to electron mobility modulation. [10][11][12] We correlate the derivative of the response to ozone concentration and utilize ultraviolet light to compensate for slow response and recovery times, respectively.…”

mentioning

confidence: 99%

“…[3][4][5][6] Several reports exist utilizing metal oxides at room temperature but they typically display response and recovery times greater than 10 minutes which also renders them unsuitable for real time monitoring. [7][8][9] Our work utilizes Atomic Layer Deposition of SnO 2 to tailor film thickness to twice the Debye length which has been shown to provide maximum sensitivity due to electron mobility modulation. [10][11][12] We correlate the derivative of the response to ozone concentration and utilize ultraviolet light to compensate for slow response and recovery times, respectively.…”

mentioning

confidence: 99%

Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing

Mills¹,

Lim²,

Lee³

et al. 2015

ECS J. Solid State Sci. Technol.

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This work demonstrates ultra-low power ozone sensors for real time, continuous, and portable monitoring. Atomic Layer Deposition (ALD) of SnO 2 enables precise control of ultrathin film thickness on the order of the Debye length to enhance sensitivity at room temperature. Correlation between ozone concentration and the rate of resistance change is used to maintain fast response times and ultraviolet (UV) illumination hastens recovery. ALD SnO 2 ultrathin film sensors realize room temperature operation with highly selective detection of 50 ppb ozone with average power consumption of 150 μW making them well suited for real time, portable environmental monitoring systems. High levels of ozone (O 3 ) have been shown to contribute to respiratory symptoms such as chronic cough, wheeze, and shortness of breath and chest colds with phlegm.1 Individuals suffering with respiratory diseases such as asthma are particularly sensitive to O 3 which can trigger an asthma attack hours after exposure.2 According to the Environmental Protection Agency, O 3 concentrations are higher near urban areas, highways and in general outside on hot sunny days highlighting the need for continuous, portable, real time monitoring of an individual's exposure levels in order to correlate personal health with surrounding environments. Sensors used for these applications must have high sensitivity, appropriate selectivity against other gases, low total power consumption, stability, accuracy, reliability and low cost. Among several sensing materials, SnO 2 has been shown to be sensitive toward gases in a variety of papers however metal oxide sensors typically require high operating temperatures to achieve good sensitivity and fast recovery resulting in mW of power consumption making them unsuitable for portable monitoring.3-6 Several reports exist utilizing metal oxides at room temperature but they typically display response and recovery times greater than 10 minutes which also renders them unsuitable for real time monitoring. [7][8][9] Our work utilizes Atomic Layer Deposition of SnO 2 to tailor film thickness to twice the Debye length which has been shown to provide maximum sensitivity due to electron mobility modulation. [10][11][12] We correlate the derivative of the response to ozone concentration and utilize ultraviolet light to compensate for slow response and recovery times, respectively. These methods enable detection of 10s of ppb of ozone with room temperature operation for average power consumption of just 150 μW. Additionally, our sensors demonstrate selectivity over interfering gases NO 2 and CO at typical atmospheric levels making them good candidates for continuous, portable monitoring. ExperimentalThe fabrication of sensor device started with 500nm thermal oxidation of Si (100) substrate for electrical isolation. After oxidation, the SnO 2 sensing material was deposited in an ALD system (Cambridge Nanotech Savannah 100 model). Tetrakis(dimethylamino)tin precursor and O 3 reactants were used to deposit SnO 2 at 200• C. The films were...

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“…Park et al [15] and Ghaddab et al [17] using SWCNT and hybrid tin dioxide/CNT as O 3 sensors reported the mechanisms for the change in the behavior resistance when interacting with an oxidizing gas such as ozone. They mentioned that during gas adsorption, there is an electron charge transfer whereby O 3 accepts electrons from CNT and the concentration of conducting holes increases experimentally leading a decrement of the signal resistance.…”

Section: Resultsmentioning

confidence: 99%

Ozone Sensing Based on Palladium Decorated Carbon Nanotubes

Colindres

Aguir

Cervantes‐Sodi

et al. 2014

Sensors

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Multiwall carbon nanotubes (MWCNTs) were easily and efficiently decorated with Pd nanoparticles through a vapor-phase impregnation-decomposition method starting from palladium acetylacetonates. The sensor device consisted on a film of sensitive material (MWCNTs-Pd) deposited by drop coating on platinum interdigitated electrodes on a SiO2 substrate. The sensor exhibited a resistance change to ozone (O3) with a response time of 60 s at different temperatures and the capability of detecting concentrations up to 20 ppb. The sensor shows the best response when exposed to O3 at 120 °C. The device shows a very reproducible sensor performance, with high repeatability, full recovery and efficient response.

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Detection of O3 and NH3 using hybrid tin dioxide/carbon nanotubes sensors: Influence of materials and processing on sensor's sensitivity

Cited by 41 publications

References 28 publications

Nanostructured Materials for Room‐Temperature Gas Sensors

Nanostructured Materials for Room‐Temperature Gas Sensors

Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing

Ozone Sensing Based on Palladium Decorated Carbon Nanotubes

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Detection of O3 and NH3 using hybrid tin dioxide/carbon nanotubes sensors: Influence of materials and processing on sensor's sensitivity

Cited by 41 publications

References 28 publications

Nanostructured Materials for Room‐Temperature Gas Sensors

Nanostructured Materials for Room‐Temperature Gas Sensors

Atomic Layer Deposition of SnO2for Selective Room Temperature Low ppb Level O3Sensing

Ozone Sensing Based on Palladium Decorated Carbon Nanotubes

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Atomic Layer Deposition of SnO₂for Selective Room Temperature Low ppb Level O₃Sensing