2016 27th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) 2016
DOI: 10.1109/asmc.2016.7491153
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Detection and classification of gate to S/D shorts using charge dynamics

Ming Lei
1
,
Kevin Wu
2
,
Tian Qing
3
et al.
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Cited by 4 publications
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E-beam inspection BVC (Bright Voltage Contrast) verification for 14nm technology: DI: Defect inspection and reduction

Zhou
1
,
Guo
2
,
Jones
3
2017
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
2
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E-beam inspection BVC (Bright Voltage Contrast) verification for 14nm technology: DI: Defect inspection and reduction

Zhou
1
,
Guo
2
,
Jones
3
2017
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
2
0
0
0
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Solved: the mystery of bright voltage contrast word-line defects for SOI technology using nanoprobing

Patterson
1
,
Hafer
2
,
Pendyala
3
et al. 2017
2017 28th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC)
4
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E-Beam inspection BVC (bright voltage contrast) verification for 14nm technology

Zhou
1
,
Guo
2
,
Jones
3
2017
2017 40th International Convention on Information and Communication Technology, Electronics and Microelectronics (MIPRO)
1
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