Detailed comparison between probe density measurements of glow discharge in argon and in helium

El-Ghazaly, Mohammed; baky, A.M. Abdel; Mansour, M.M.; Gabr, M.; El-Sayed, Naglaa Mohammed

doi:10.1016/j.jqsrt.2004.12.029

Cited by 6 publications

(5 citation statements)

References 19 publications

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“…With increasing pressure, the wall current density is increased. Elghazaly et al [4] also found that the plasma density in Ar and He glow discharges increased as the plasma absorbed power and pressure increased .…”

Section: Current Density and Ion Flux Measurementsmentioning

confidence: 94%

“…This is because stepwise ionization, which can lead to a drop in the required mean ionization energy for the production of an electron-ion pair, is more probable in Ar than He. Consequently, ionization efficiency is higher in Ar than He [4,12].…”

Section: Current Density and Ion Flux Measurementsmentioning

confidence: 97%

“…Direct current (DC) glow discharge has been historically important, both in applications of weakly ionized plasmas and research in the field of plasma itself [1]. DC glow discharge is a luminous low pressure discharge with worldwide industrial applications, such as in lasers, microelectronics technology, surface treatment, waste treatment, materials analysis, and as a light source [2][3][4]. One of the most important applications of glow discharge is as a cleaning procedure in vacuum technology to improve the vacuum quality.…”

Section: Introductionmentioning

confidence: 99%

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Experimental measurements of the hollow cathode DC glow discharge parameters in Ar and He plasmas

Omrani

Amrollahi

Iraji

2016

Plasma Sources Sci. Technol.

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In this article, we focus on some of the fundamental parameters of SS316L hollow cathode glow discharge. Four SS316L samples are placed at different locations on the cathode surface and the current passed through them is measured in Ar and He glow discharge plasmas. The wall current densities of Ar and He are in the range of 8-25 µA cm −2 and 8-35 µA cm −2 , respectively. Results also show that with decreasing working pressure, the ion flux and current density distribution on the wall surface becomes more uniform. The ion flux of the Ar and He is in the range of 10 13 to 10 14 − ion cm 2 . Total energy losses of Ar and He are measured at the pressure range of 1.4-5.5 × 10 −2 torr and 3.2-7.1 × 10 −1 , respectively. In both Ar and He, total energy losses decreased with increasing pressure. The secondary electron emission coefficients of Ar and He, which are evaluated for the hallow cathode configuration, are about 0.42 and 0.26, respectively, and are higher in comparison with the plate cathode configuration.

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Section: Current Density and Ion Flux Measurementsmentioning

confidence: 94%

Section: Current Density and Ion Flux Measurementsmentioning

confidence: 97%

Section: Introductionmentioning

confidence: 99%

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Experimental measurements of the hollow cathode DC glow discharge parameters in Ar and He plasmas

Omrani

Amrollahi

Iraji

2016

Plasma Sources Sci. Technol.

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“…Moreover, it can be found that the ion density is higher than the electron density in the measure-ment no matter whether the DC is added or not. This phenomenon was found in other works too [14,15] and cannot be explained rationally at present. It is most likely due to collisions of positive ions with neutrals in the probe sheath that are not taken into account in the Laframboise theory.…”

Section: Discharge Characteristicsmentioning

confidence: 51%

Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas

Zhan

Wei

Zhang

et al. 2015

Plasma Sci. Technol.

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In this paper, the double-discharge plasma generated by radio frequency (RF) and direct current (DC) has been investigated. In comparison with their single-frequency counterpart, the interaction between the two excitations is significant and beneficial. The results show that the RF discharge can effectively increase the DC discharge current and decrease the DC voltage; meanwhile the DC discharge is favorable to feed abundant high energy seed electrons to the ICP discharge sustaining at 13.56 MHz for the latter to acquire higher plasma density and lower plasma potential by increasing the ionization rate. The innovative design has been demonstrated to facilitate more homogeneous performance with higher plasma density.

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“…Therefore, the knowledge about plasma parameters such as electron temperature [9], electron number density [10] and electron energy distribution function (EEDF), usually referred to as the Druyvesteyn distribution [11,12], is essential. A Langmuir probe [13,14] is employed for obtaining information about the plasma parameters.…”

Section: Introductionmentioning

confidence: 99%

Plasma characterization for nitridation of aluminium alloy using 50 Hz ac discharge

Shah

Ahmad

Zakaullah

et al. 2008

Plasma Devices and Operations

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A 50 Hz ac abnormal glow discharge is characterized as a function of filling pressure (1-4 mbar) using a Langmuir probe. It is found that electron temperature, electron density and electron energy distribution function decrease with the gas filling pressure. Nitriding of aluminum alloy (Al−Mg 2 −Si) is performed for various time durations (3, 6, 9 and 12 h) and pressures (1 and 2 mbar) by keeping the input power (100 W) and substrate temperature (250 • C) constant. To explore the surface properties induced by plasma, X-ray diffractometer, optical micrography, atomic force microscopy and Vickers micro-hardness tester diagnostic techniques are used. Results exhibit the formation of cubic aluminum nitride. A significant increase in surface hardness is observed when samples are exposed at 1 mbar pressure for 12 h of processing time. A rapid decrease in surface hardness values with the imposed load suggests the formation of a thin modified surface layer.

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Detailed comparison between probe density measurements of glow discharge in argon and in helium

Cited by 6 publications

References 19 publications

Experimental measurements of the hollow cathode DC glow discharge parameters in Ar and He plasmas

Experimental measurements of the hollow cathode DC glow discharge parameters in Ar and He plasmas

Study of the Characteristics of DC and ICP Hybrid Discharge Plasmas

Plasma characterization for nitridation of aluminium alloy using 50 Hz ac discharge

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