Experimental measurements of the hollow cathode DC glow discharge parameters in Ar and He plasmas

Abstract

In this article, we focus on some of the fundamental parameters of SS316L hollow cathode glow discharge. Four SS316L samples are placed at different locations on the cathode surface and the current passed through them is measured in Ar and He glow discharge plasmas. The wall current densities of Ar and He are in the range of 8-25 µA cm −2 and 8-35 µA cm −2 , respectively. Results also show that with decreasing working pressure, the ion flux and current density distribution on the wall surface becomes more uniform. The ion flux of the Ar and He is in the range of 10 13 to 10 14 − ion cm 2 . Total energy losses of Ar and He are measured at the pressure range of 1.4-5.5 × 10 −2 torr and 3.2-7.1 × 10 −1 , respectively. In both Ar and He, total energy losses decreased with increasing pressure. The secondary electron emission coefficients of Ar and He, which are evaluated for the hallow cathode configuration, are about 0.42 and 0.26, respectively, and are higher in comparison with the plate cathode configuration.

Measurements of plasma parameters in a hollow electrode AC glow discharge in helium

“…where P abs is the total absorbed power, u B is the Bohm velocity, A eff is the effective area for particle loss, and e T is the total energy lost per electron-ion pair. The value of e T used in this study was obtained from other experimental results [18,55]. The results in figure 5 indicate that the plasma density increased as the input power increased, and the experimental results are consistent with the theoretical calculations.…”

“…the generation of ozone, surface treatments, the degradation of pollutant molecules, and aerodynamic control techniques [12,13]. Among the different configurations of glow discharge, hollow cathode glow discharge is of considerable interest because of its extraordinary properties and broad applications [4,[14][15][16][17][18]. In our previous studies, hollow electrode glow discharge with an AC power supply was experimentally investigated, and the results demonstrated that the device presented a considerable advantage in terms of electromagnetic wave propagation in plasma [19][20][21].…”

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