Destruction of volatile organic compounds used in a semiconductor industry by a capillary tube discharge reactor

Kohno, Hitoshi; Tamura, Masaya; Shibuya, A.; Honda, Susumu; Berezin, Alexander A.; Chang, Jaehee; Yamamoto, Takeyuki

doi:10.1109/ias.1995.530472

Cited by 14 publications

(18 citation statements)

References 11 publications

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“…Of course, the other bonds are also likely to be destroyed by high energy electrons. Formulas 11 to 16 are the possible reaction equations of the process of toluene removal (Kohno et al, 1998 …”

Section: Byproducts and Decomposition Pathways Of Toluenementioning

confidence: 99%

Volatile organic compounds decomposition using nonthermal plasma coupled with a combination of catalysts

Zhu

Wan

et al. 2011

Int. J. Environ. Sci. Technol.

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A series of experiments were performed for toluene decomposition from a gaseous influent at normal temperature and atmospheric pressure by nonthermal plasma coupled with a combination of catalysts technology. Nonthermal plasma was generated by dielectric barrier discharge. γ-Al 2 O 3 was used to be a sorbent and a catalyst carrier. Nanocatalysts were MnO 2 /γ-Al 2 O 3 coupled with modified ferroelectric of nano-Ba 0.8 Sr 0.2 Zr 0.1 Ti 0.9 O 3 . γ-Al 2 O 3 played an important role in prolonging reaction time of nonthermal plasma with volatile organic compounds molecules. MnO 2 /γ-Al 2 O 3 has an advantage for ozone removal, while nano-Ba 0.8 Sr 0.2 Zr 0.1 Ti 0.9 O 3 is a kind of good ferroelectric material for improving energy efficiency. Thus these packed materials were incorporated together to strengthen nonthermal plasma power for volatile organic compounds decomposition. The results showed the synergistic technology resulted in greater enhancement of toluene removal and energy efficiencies and a better inhibition for ozone formation in the gas exhaust. Based on the data analysis of the Fourier transforms infrared spectrum, the reaction process of toluene decomposition and the mechanism of synergistic effect are discussed. The results showed in a complex oxidation mechanism of toluene via several pathways, producing either ringretaining or ringopening products. The final products were carbon dioxide and water.

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Section: Byproducts and Decomposition Pathways Of Toluenementioning

confidence: 99%

Volatile organic compounds decomposition using nonthermal plasma coupled with a combination of catalysts

Zhu

Wan

et al. 2011

Int. J. Environ. Sci. Technol.

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“…Plasma-assisted technology for environmental purposes, such as radio frequency plasma (Lee et al 1996), surface discharge reactors (Oda et al 2002), dielectric barrier discharge reactors (Tonkyn et al 1996), pulsed discharge reactors (Yamamoto et al 1992), capillary-tube type discharge reactors (Kohno et al 1998), and gliding arc (Krawczyk and Ulejczyk 2003, Lee et al (1996) tried to decompose 1,1-dichloroetylene (DCE) using RF plasma. It showed that below 10% DCE (diluted in oxygen) at gas flow rate of 15 cm 3 , the DCE was totally removed.…”

Section: Decomposition Of Chlorinated Volatile Organic Carbonsmentioning

confidence: 99%

“…67% and the presence of noble gases could help increasing the decomposition rate by halogen-collision mechanism with atom carbon of the VOC molecules. Kohno et al (1998) also conducted experiments to remove some VOCs using capillary column plasma. The authors claimed that they were able to remove the VOCs as high as 90% under a short residence time (3.8 ms) with a destruction energy efficiency of up to 95 g of compound/kWh.…”

Section: Decomposition Of Chlorinated Volatile Organic Carbonsmentioning

confidence: 99%

Decomposition of greenhouse gases by plasma

et al. 2008

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The topic of decomposition and reduction of greenhouse gases is becoming an important issue in tackling the global warming effect since several years ago. Several technologies, including plasma-utilized process, were proposed to improve the treatment ability for the destruction of green house gases usually emitted by industrial activities. In this review paper, the application of plasma to reduce the emission of greenhouse gases was briefly summarized.

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“…In order to solve the problem, some research groups have carried out works on decomposition of VOCs using hybrid technology such as combined EB or plasma with catalyst (Kim et al, 2010(Kim et al, , 2005(Kim et al, , 2004Jeon et al, 2008;Moon, 2003;Ogata et al, 1999;Kohno et al, 1998). In this study, the EB-catalyst coupling system has been introduced as an advanced oxidizing technology as follows.…”

Section: Advantage Of Eb-catalyst Coupling Systemmentioning

confidence: 99%

“…However, one of disadvantages associated with this technique is the formation of by-products (Kim et al, 2010;Sun et al, 2009;Jeon et al, 2008;Kim et al, 2005). In order to solve that problem, a few research groups have investigated the decomposition of VOCs using a hybrid technology such as combination of EB or plasma with catalyst (Kim et al, 2010(Kim et al, , 2005(Kim et al, , 2004Jeon et al, 2008;Ogata et al, 1999;Kohno et al, 1998). Therefore, the objective of this research is to review all the subjects covering EB for the decomposition of aromatic and aliphatic VOCs.…”

Section: Introductionmentioning

confidence: 99%

A Review on VOCs Control Technology Using Electron Beam

Son¹,

Kim²,

Kim³

2010

ajae

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The removal characteristics for aromatic and aliphatic VOCs by electron beam (EB) were discussed in terms of several removal variables such as initial VOC concentration, absorbed dose, background gas, moisture content, reactor material and inlet temperature. It was reviewed that only reactor material was an independent variable among the potential control factors concerned. It was also suggested that main mechanism by EB should be radical reaction for the VOC removal rather than that by primary electrons. It was discussed that the removal efficiency of benzene was lower than that of hexane due to a closed benzene ring. In the case of aromatic VOCs, it was observed that the decomposition of the VOCs with more functional groups attached on the benzene ring was much easier than those with less ones. As for aliphatic VOCs, it was also implied that the longer carbon chain was, the higher the removal efficiency became. An EB-catalyst hybrid system was discussed as an alternative way to remove VOCs more effectively than EB-only system due to much less by-products. This hybrid included supporting materials such as cordierite, Y-zeolite, and γ-alumina.

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Destruction of volatile organic compounds used in a semiconductor industry by a capillary tube discharge reactor

Cited by 14 publications

References 11 publications

Volatile organic compounds decomposition using nonthermal plasma coupled with a combination of catalysts

Volatile organic compounds decomposition using nonthermal plasma coupled with a combination of catalysts

Decomposition of greenhouse gases by plasma

A Review on VOCs Control Technology Using Electron Beam

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