Design, technology, numerical simulation and optimization of building blocks of a micro and nano scale tensile testing platform with focus on a piezoresistive force sensor

Meszmer, Peter; Hiller, Karla; May, Daniel; Hartmann, Steffen; Shaporin, Alexey; Mehner, Jan; Wunderle, Bernhard

doi:10.1109/eurosime.2014.6813843

Cited by 4 publications

(3 citation statements)

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“…To analyze nano‐functional elements as CNTs, nanowires, or microfluidic tubes, the requirements depicted in Table have been formulated for the building blocks of MEMS test stages . The schematic structure of a fatigue device based on two actuators in a push‐pull configuration, a displacement sensor, and a force sensor is shown in Figure .…”

Section: From Building Blocks To Test Platformsmentioning

confidence: 99%

“…The design of the displacement sensor in use, which is based on specified design rules, would achieve the required resolution given in Table . A selection of design parameters is described in Table .…”

Section: From Building Blocks To Test Platformsmentioning

confidence: 99%

“…Following a SCA implies that the processes required to create a loading stage have to be compatible with the process flow of the sample. In previous publications, the authors have presented and discussed the principles of SCA compatible test stages and building blocks of such test devices, which can be fitted to different types of samples and testing environments. The SCA idea and concept has been used by different research groups, as shown in refs.…”

Section: Introductionmentioning

confidence: 99%

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Highly Miniaturized MEMS‐Based Test Platforms for Thermo‐Mechanical and Reliability Characterization of Nano‐Functional Elements − Technology and Functional Test Results

Meszmer

Hahn

Hiller

et al. 2019

Physica Status Solidi (a)

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This paper reports on concepts, technology, integration aspects, and results of a MEMS-based test platform for reliability tests of micro and nano objects.Building blocks of this platform to be used in in-plane push-pull-configurations are a thermal actuator, a force sensor, and a displacement sensor as well as several types of samples to be integrated directly or indirectly. The technology concept is proven for aluminum wires as a first demonstrator for an integrated specimen. The modular concept enables the adoption of the platform for further types of samples and test configurations. The building blocks are simulated using a Finite-Element approach and the results are compared to experimentally obtained data sets. According to the specifications, the thermal actuator is capable of providing displacements up to 1.5 μm. The displacement and the force sensor are specified to provide sensitivities of 3 fF nm À1 and 2.5 μV nN À1 , respectively. SEM image of a piezoresistive force sensor attached to an integrated Al wire as test sample À building blocks of MEMS-based test platforms.

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Section: From Building Blocks To Test Platformsmentioning

confidence: 99%

Section: From Building Blocks To Test Platformsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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