Design, simulation, fabrication and characterization of nano-scaled acceleration grids

Kallis, K. T.; Dietz, D.R.; Subaşı, Ersoy; Müller, Marcel; Kontis, Christopher; Zimmer, C.

doi:10.1016/j.mee.2014.04.036

Cited by 4 publications

(2 citation statements)

References 5 publications

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“…The hexagonal grid made of titanium nitride (TiN) is supported by abutments made of silicon dioxide (SiO 2 ). The honeycombed structure of the grid originates from an optimization of the mechanical strength of freely suspended grids (Kallis et al, 2014). The wide, honeycombed vent holes of the grid provide fast gas exchange and therefore a fast response time.…”

Section: Design and Principle Of Operationmentioning

confidence: 99%

Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements

Giebel

Köhle

Stramm

et al. 2017

J. Sens. Sens. Syst.

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Abstract. The concept of the micro-structured vacuum sensor presented in this article is the measurement of the electrical conductivity of thinned gases in order to develop a small, economical and quite a simple type of vacuum sensor. There are already some approaches for small vacuum sensors. Most of them are based on conservative measurement principles similar to those used in macroscopic vacuum gauges. Ionization gauges use additional sources of energy, like hot cathodes, ultraviolet radiation or high voltage for example, for ionizing gas molecules and thereby increasing the number of charge carriers for measuring low pressures. In contrast, the concept discussed here cannot be found in macroscopic sensor systems because it depends on the microscopic dimension of a gas volume defined by two electrodes. Here we present the concept and the production of a micro-structured vacuum sensor chip, followed by the electrical characterization. Reference measurements with electrodes at a distance of about 1 mm showed currents in the size of picoampere and a conductivity depending on ambient pressure. In comparison with these preliminary measurements, fundamental differences regarding pressure dependence of the conductivity are monitored in the electrical characterization of the micro-structured sensor chip. Finally the future perspectives of this sensor concept are discussed.

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Section: Design and Principle Of Operationmentioning

confidence: 99%

Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements

Giebel

Köhle

Stramm

et al. 2017

J. Sens. Sens. Syst.

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show abstract

“…For this purpose, a honeycombed grid structure with supporting elements of silicon dioxide is used, which is optimized with the help of the finite element method (see Fig. 9, Kallis et al, 2014). However, the biggest challenge of the front electrode is described by its fabrication considering the operation conditions.…”

Section: Front Electrodementioning

confidence: 99%

Micro-structured electron accelerator for the mobile gas ionization sensor technology

Zimmer

Kallis

Giebel

2015

J. Sens. Sens. Syst.

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Abstract. Mobile and economically priced gas monitoring and warning systems will become increasingly important for civil security, such as in fire brigade operations in undefined hazardous environments (Daum et al., 2006). Normally, photoionization detectors (PIDs) are used for the detection of gases. Hereby, the principle is based upon the ionization of the measured gas by photons, which are generated by a high-energetic gas discharge lamp with energy of 10-11 eV. Besides the detrimental unspecific gas detection because of the ionization of all gases with ionization potential (IP) below the provided photon energy, sensors also have a short lifetime combined with a high cost (http://www.intlsensor.com/pdf/photoionization.pdf).This can be remedied by the concept of an electronic supported photoionization detector (ePID; Zimmer et al., 2012) consisting of a durable UV-LED with an above-positioned electron accelerator chip manufactured on a glass substrate by planar technology. Photoelectrons are extracted by UV illumination out of the bottom electrode and will be accelerated to an energy matching the ionization potential of the gas by a downstream acceleration grid. Thereby, the stable honeycomb-structured grid acts as a porous separator between the evacuated electron acceleration path due to nm scaling and the ionization area of the detector. To enhance the emitting area yielding a higher photoelectron current, the grid structure almost levitates, realized by the use of compatible planar technological processes such as reactive ion etching (RIE) and isotropic wet etching of sacrificial layers, which will be explained in detail in this paper. Furthermore, the tunability of the grid's acceleration voltage would enable a substance-specific determination of the gas composition, where the ionization of the analytes is clearly performed by photoelectrons instead of photons.

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Fabricating freely suspended structures optimized regarding mechanical and electrochemical stability for sensor applications

Giebel

Köhle

Czyba

et al. 2016

Microelectronic Engineering

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Design, simulation, fabrication and characterization of nano-scaled acceleration grids

Cited by 4 publications

References 5 publications

Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements

Concept for a MEMS-type vacuum sensor based on electrical conductivity measurements

Micro-structured electron accelerator for the mobile gas ionization sensor technology

Fabricating freely suspended structures optimized regarding mechanical and electrochemical stability for sensor applications

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