The acoustoelectric interaction between an ultrasound wave propagating in a thin piezoelectric plate and an adjacent semiconductor results in a current that is proportional to the ultrasound intensity. These devices, inherently insensitive to the phase of the acoustic wavefront, can be used for large-area total power meters as well as spot intensity meters. They have broadband response and are capable of following the envelope of typical diagnostic imaging pulses. A previously derived model describing the interaction is reviewed. Experimental results obtained with several detectors are presented, including sensitivity and frequency response.
Intravascular and endoscopic acoustic imaging typically require high ultrasonic operating frequencies, over 7 MHz. At these frequencies the ceramic transducer dimensions become very small; pitches in the order of 20 to EOpm are existing interconnect approaches and be fabricated at low needed. Moreover, such arrays must be compatible with cost. These piezoelectric transducer array requirements severely challenge the ability of conventional ET ceramic technologies in terms of cost-effective fabrication.To meet the demand for such transducer shapes, MS1 has developed a net shape ceramic injection molding process for production of piezoelectric ceramics in complex shapes.Using this technique, MS1 has produced ultrafine scale 2-2 piezocomposite arrays having FZI elements less than 25pm wide and pitches under 50pm. This paper reviews recent advances in the net shape molding technology, and compares the characteristics of an injection molded 7 MHz 2-2 configuration with that of a similar array prepared by conventional dicing.
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