Design Optimization of Silicon-on-Insulator Slot-Waveguides for Electro-optical Modulators and Biosensors

Steglich, Patrick; Villringer, Claus; Pulwer, Silvio; Casalboni, M.; Schrader, Sigurd

doi:10.1007/978-3-319-30137-2_11

Cited by 20 publications

(17 citation statements)

References 30 publications

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“…The most important component of all integrated photonic biosensors is the silicon waveguide. During the last decade, many effort has been undertaken to improve waveguide geometries for optical sensing by simulation studies [38,39,40]. In principle, there are three types of widely used waveguides, namely strip waveguide, rib waveguide and slot waveguide, as illustrated in Figure 2.…”

Section: Photonic Devices and Sensing Mechanismsmentioning

confidence: 99%

“…From Figure 3 it is apparent that the highest optical field confinement in the cladding is provided by the slot waveguide structure. Simulation studies have revealed that SOI slot waveguides achieve an optical field confinement of 0.7, i.e., 70% of the guided light is confined in the cladding and not in the silicon core [39,40,41]. In contrast, strip waveguides achieve an optical field confinement factor of 0.2.…”

Section: Photonic Devices and Sensing Mechanismsmentioning

confidence: 99%

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Optical Biosensors Based on Silicon-On-Insulator Ring Resonators: A Review

et al. 2019

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Recent developments in optical biosensors based on integrated photonic devices are reviewed with a special emphasis on silicon-on-insulator ring resonators. The review is mainly devoted to the following aspects: (1) Principles of sensing mechanism, (2) sensor design, (3) biofunctionalization procedures for specific molecule detection and (4) system integration and measurement set-ups. The inherent challenges of implementing photonics-based biosensors to meet specific requirements of applications in medicine, food analysis, and environmental monitoring are discussed.

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Section: Photonic Devices and Sensing Mechanismsmentioning

confidence: 99%

Section: Photonic Devices and Sensing Mechanismsmentioning

confidence: 99%

Optical Biosensors Based on Silicon-On-Insulator Ring Resonators: A Review

et al. 2019

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“…To describe the interaction of light with the surrounding material, the field confinement factor Γ is used as a figure of merit to characterize devices like slot-waveguides and their ability to confine an optical mode within a certain region [19]. The field confinement factor is defined as the ratio of the time averaged energy flow through the area of interest A int to the time averaged energy flow through the total area A tot [20]…”

Section: Field Confinement Factormentioning

confidence: 99%

Comparative Study of Nano-Slot Silicon Waveguides Covered by Dye Doped and Undoped Polymer Cladding

2018

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Nonlinear optical dyes doped in optical polymer matrices are widely used for electro-optical devices. Linear optical properties change with dye concentration, which leads to a change in modal properties, especially in nano-structured integrated waveguides such as silicon slot-waveguides. Here, we investigate the influence of a nonlinear optical dye on the performance of a silicon-organic hybrid slot-waveguide. A simulation study of the modal and optical confinement properties is carried out and dependence of the structural parameters of the slot-waveguide and the organic cladding material is taken into account. As cladding material, a guest-host polymer system is employed comprising the nonlinear optical dye Disperse Red 1 (DR1) doped in a poly[methyl methacrylate] (PMMA) matrix. The refractive indices of doped and undoped PMMA were deduced from ellipsometric data. We present a guideline for an optimized slot-waveguide design for the fabrication in silicon-on-insulator technology giving rise to scalable, high-performance integrated electro-optical modulators.

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“…SEM image (left) of slot waveguides with different slot widths fabricated using 248 nm lithography. FIB image (right) of a slot waveguide cross section [13].…”

Section: Silicon-on-insulator Slot Waveguide Theorymentioning

confidence: 99%

Silicon-on-Insulator Slot Waveguides: Theory and Applications in Electro-Optics and Optical Sensing

Steglich¹

2018

Emerging Waveguide Technology

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This chapter deals with the basic concept of silicon-on-insulator (SOI) slot waveguides, including slot waveguide theory, fabrication steps, and applications. First, in the theory section, a modal field expression and the characteristic equation is derived, which is also valid for higher-order modes. SOI slot waveguide structures are simulated and characteristic values like the effective refractive indices and the field confinement factors are determined. The fabrication section describes typical SOI fabrication steps and the limits of current fabrication techniques. Additionally, developments regarding loss reduction in SOI slot waveguides are given from the fabrication point of view. This is followed by the theory and practice of slot waveguide based electro-optical modulators. Here, the SOI slot waveguide is embedded in an organic nonlinear optical material in order to achieve record-low voltage-length products. In the field of optical sensors, it is shown that slot waveguides enable remarkable waveguide sensitivity for both refractive index sensing and surface sensing.

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Design Optimization of Silicon-on-Insulator Slot-Waveguides for Electro-optical Modulators and Biosensors

Cited by 20 publications

References 30 publications

Optical Biosensors Based on Silicon-On-Insulator Ring Resonators: A Review

Optical Biosensors Based on Silicon-On-Insulator Ring Resonators: A Review

Comparative Study of Nano-Slot Silicon Waveguides Covered by Dye Doped and Undoped Polymer Cladding

Silicon-on-Insulator Slot Waveguides: Theory and Applications in Electro-Optics and Optical Sensing

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