Design of parallel robots in microrobotics

Abstract

During the past few years, there has been an increasing demand in the field of precision engineering for fine motion in multi-degrees of freedom systems. These applications motivated the development of a new robotics field called microrobotics. In this paper, we review both the design guidelines for microrobots and the advantages of using parallel robots in very high precision applications. Parallel micromanipulators using elastic joints as well as structures manufactured in single solid and metallic bellows are introduced.

Dynamic Model of a 6-dof Parallel Manipulator Using the Generalized Momentum Approach

“…Parallel manipulators are well known because of their high dynamic performances and low positioning errors (Chablat et al, 2004;Merlet, 2006). In the last few years parallel manipulators have attracted great attention from researchers involved with robot manipulators (Bruzzone, 2005), robotic end effectors (Vischer & Clavel, 2000), robotic devices for high-precision robotic tasks (Pernette, et al, 2000), machine-tools (Zhang & Gosselin, 2002), simulators (Kim et al, 2002), and haptic devices (Constantinescu et al, 2005). The mechanical structure of the RCID comprises a fixed (base) platform and a moving (payload) platform, linked together by six independent, identical, open kinematic chains (Figure 2).…”

Mechatronic Scanning System with Integrated Micro Electro Mechanical System Position Sensors

“…One of them is the development of mechanical structures appropriate for monitoring and control of working tools to be applied in the domains of microsurgery and microbiology, microelectronics research, chemistry and investigation of thin films, scanning of micro-and nano-surfaces, micro assembly etc. [1,2,3].…”

“…These devices comprise high-precision mechanical structures free of backlash, friction and hysteresis [2], in order to obtain the required submicron accuracy. Mechanisms with closed kinematics chains are suitable for high-precision applications [4,5,6].…”

Fatigue testing of flexure hinges for the purpose of the development of a high-precision micro manipulator

“…stages, alignment devices and positioning systems). In high-precision micro manipulators, parallel robots are normally implemented with compliant joints (Pernette et al, 1997), which operate smoothly (free of clearance and friction) and need to be supported by highresolution actuators and sensors (Bellouard, 2010). Among the different types of compliant joints (Raatz, 2006), notch flexure hinges are most widely spread offering simplicity and compactness.…”

“…It usually takes tension-compression and in-plane bending and does not take out-of-plane bending, shear and torsion into account. The basic equations are derived from the mechanics of material and enhanced by the stress concentration factors for notch shapes (Pilkey and Pilkey, 2008;Young and Budynas, 2002). This can also be approximated by using the finite element method (Smith et al, 1987;Schotborgh et al, 2005).…”