Design of low actuation voltage RF MEMS switch

Pacheco, Sergio; Katehi, L.P.B.; Nguyen, C.T.-C.

doi:10.1109/mwsym.2000.860921

Cited by 181 publications

(117 citation statements)

References 5 publications

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“…Pacheco et al [29] demonstrated a 9 V electrostatically actuated switch, having a five-meander arm at each of the four corners of the capacitive membrane bridge. Here, the capacitance ratio ¼ 2.5 pF/47 fF ¼ 43; insertion loss ¼ 0.16 dB at 40 GHz; isolation ¼ 26 dB at 40 GHz; and self-actuation occurs with a mean RF power of 6.6 W. A microphotograph of a similar switch is shown in Fig.…”

Section: Switchesmentioning

confidence: 99%

Review of radio frequency microelectromechanical systems technology

Lucyszyn

2004

IEE Proceedings - Science, Measurement and Technology

124

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A review of radio frequency microelectromechanical systems (RF MEMS) technology, from the perspective of its enabling technologies (e.g. fabrication, RF micromachined components and actuation mechanisms) is presented. A unique roadmap is given that shows how enabling technologies, RF MEMS components, RF MEMS circuits and RF microsystems packaging are linked together; leading towards enhanced integrated subsystems. An overview of the associated fabrication technologies is given, in order to distinguish between the two distinct classes of RF microsystems' component technologies; non-MEMS micromachined and true MEMS. An extensive literature survey has been undertaken and key papers have been cited; from these, the motivations behind different RF MEMS technologies are highlighted. The importance of understanding the limitations for realising new and innovative ideas in RF MEMS is discussed. Finally, conclusions are drawn as to where future RF MEMS technology may lead. It is likely that the switch will continue to be the most important RF MEMS component, with future work investigating its enhanced functionality, subsystem integration and volume production. The focus of RF MEMS circuits will shift from the digital phase shifter to high-Q tuneable filters.

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Section: Switchesmentioning

confidence: 99%

Review of radio frequency microelectromechanical systems technology

Lucyszyn

2004

IEE Proceedings - Science, Measurement and Technology

124

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“…The device parameters derived from the equivalent model of a MEMS switch reported in [12], alongside the capacitance ratio of the switch in both states examined in [13,14] were optimized with fabrication limitations and project objectives The design of the RF MEMS switch and varactor begins with determining the dimensions of the CPW transmission line, i.e. the gap G and signal line width S, which play an important roles in the devices' signal loss and bandwidth response and determine the switch and varactor bridge length.…”

Section: Mems Switches and Varactor Designmentioning

confidence: 99%

Low-Cost Microfabrication for MEMS Switches and Varactors

Obuh

Doychinov

Steenson

et al. 2018

IEEE Trans. Compon., Packag. Manufact. Technol.

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Abstract-This paper presents a low-cost micro-fabrication technique for manufacturing RF MEMS switches and varactors without intensive cleanroom environments. The fabrication process entails only laser micro-structuring technique, noncleanroom micro-lithography, standard wet-bench and hot-film emboss of SU-8 and ADEX polymers. MEMS movable structures were fabricated out of 14-m-thick Aluminum foils and suspended above coplanar-waveguide transmission lines, which were implemented on top of FR4 substrates, via 5-m-thick SU-8 dielectric anchors. Both MEMS structures and FR4 substrate were integrated using micro-patterned polymers, developed by using dry-film ADEX and SU-8 polymers, for a composite assembly. An average fabrication yield of higher than 60% was achieved, calculated from ten fabrication attempts. The RF measurement results show that the RF MEMS devices fabricated by using the novel micro-fabrication process have good figure-ofmerits, at much lower overall fabrication costs, as compared to the devices fabricated by conventional cleanroom process, enabling it as a very good micro-fabrication process for cost-effective rapid prototyping of MEMS.Index Terms -Subtractive manufacturing, micro electromechanical systems (MEMS), rapid prototyping.

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“…An approximate formula to calculate the actuation or pull-in voltage for these metal switches is given by [6,7]:…”

Section: Fig 2 Measured Actuation Voltages For Number Of Switches Agmentioning

confidence: 99%

Performance of RF MEMS switches at low temperatures

Llamas-Garro

Lancaster

et al. 2006

Electron. Lett.

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The actuation voltage of microelectromechanical system (MEMS) metal switches was investigated at temperatures ranging from 10 to 290 K. The investigation shows a 50% increase in the actuation voltage at low temperature. A comparison has been made using a published model and showed similar increment of actuation voltage at low temperature.Introduction: Over the past few years, radio-frequency microelectromechanical systems (RF MEMS) fabricated using semiconductor micro-fabrication technology have gained significant interest for wireless communication applications owing to their small size, integration capability and superior performance. For instance, using RF MEMS switches, RF circuits such as variable capacitors, tunable filters, phase shifters and signal routers have been demonstrated [1]. Recently, there has been research interest in the application of the high-Tc superconductor (HTS) in combination with RF MEMS devices. A switched HTS microstrip resonator and a tunable HTS filter, both incorporating MEMS technology, have been demonstrated [2,3]. While successful integration of MEMS switches onto HTS devices is a challenging task, the operational issue of RF MEMS switches at low temperatures is another key consideration to many microwave and system designers. In fact, there has been little literature reporting the behaviour of MEMS switches at cryogenic temperature. In this Letter, we report our recent findings on low temperature measurements of MEMS metal switches.

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Design of low actuation voltage RF MEMS switch

Cited by 181 publications

References 5 publications

Review of radio frequency microelectromechanical systems technology

Review of radio frequency microelectromechanical systems technology

Low-Cost Microfabrication for MEMS Switches and Varactors

Performance of RF MEMS switches at low temperatures

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