Design of efficient focused surface acoustic wave devices for potential microfluidic applications

Sankaranarayanan, Subramanian K. R. S.; Bhethanabotla, Venkat R.

doi:10.1063/1.2891577

Cited by 36 publications

(26 citation statements)

References 32 publications

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“…Based on FPW theory [1,7,8,12], the operating frequency shift caused by mass-loading of the silicon/isolation/metal/piezoelectric floating thin-plate can be expressed by the following equation [1,13,14]:

\frac{Δ f}{f_{0}} {= S}_{m} Δ_{m}

where S m denotes the mass-sensitivity of the FPW device in mass per unit area ( Δ m ). Since the mass of the floating thin-plate of the FPW device is much smaller than that of the bulky substrates adopted in other acoustic microsensors, any small changes in the mass can affect phase velocity and operating frequency shift (>5 kHz).…”

Section: Theory and Designmentioning

confidence: 99%

Development of an FPW Biosensor with Low Insertion Loss and High Fabrication Yield for Detection of Carcinoembryonic Antigen

Lan

Huang

Lin

et al. 2016

Sensors

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In the last two decades, various flexural plate-wave (FPW)-based biosensors with low phase velocity, low operation frequency, high sensitivity, and short response time, have been developed. However, conventional FPW transducers have low fabrication yield because controlling the thickness of silicon/isolation/metal/piezoelectric multilayer floating thin-plate is difficult. Additionally, conventional FPW devices usually have high insertion loss because of wave energy dissipation to the silicon substrate or outside area of the output interdigital transducers (IDTs). These two disadvantages hinder the application of FPW devices. To reduce the high insertion loss of FPW devices, we designed two focus-type IDTs (fan-shaped and circular, respectively) that can effectively confine the launched wave energy, and adopted a focus-type silicon-grooved reflective grating structure (RGS) that can reduce the wave propagation loss. To accurately control the thickness of the silicon thin-plate and substantially improve the fabrication yield of FPW transducers, a 60 °C/27 °C two-step anisotropic wet etching process was developed. Compared with conventional FPW devices (with parallel-type IDTs and without RGS), the proposed FPW devices have lower insertion loss (36.04 dB) and higher fabrication yield (63.88%). Furthermore, by using cystamine-based self-assembled monolayer (SAM) nanotechnology, we used the improved FPW device to develop a novel FPW-based carcinoembryonic antigen (CEA) biosensor for detection of colorectal cancer, and this FPW-CEA biosensor has a low detection limit (5 ng/mL), short response time (<10 min), high sensitivity (60.16–70.06 cm2/g), and high sensing linearity (R-square = 0.859–0.980).

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\frac{Δ f}{f_{0}} {= S}_{m} Δ_{m}

Section: Theory and Designmentioning

confidence: 99%

Development of an FPW Biosensor with Low Insertion Loss and High Fabrication Yield for Detection of Carcinoembryonic Antigen

Lan

Huang

Lin

et al. 2016

Sensors

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“…Combined experimental and theoretical investigations to identify the best substrates and propagation directions for potential biosensing applications form the main focus of this research. Our previous theoretical and experimental investigations indicate that such a device fabricated on LiNbO 3 was better suited for material characterization than for biosensing applications [4][5][6].…”

Section: Introductionmentioning

confidence: 99%

“…In cleaning of nonspecifically bound proteins in biosensor applications [4][5]. With the possibility of launching shearhorizontal SAW waves in one direction and Rayleigh waves in another, the hexagonal device should serve as a better biosensor element for liquid phase applications and help to simultaneously eliminate the problems associated with biofouling which render conventional biosensors ineffective.…”

Section: Introductionmentioning

confidence: 99%

Finite Element modeling of hexagonal surface acoustic wave biosensor based on LiTaO<inf>3</inf>

2008

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The main advantage of numerical methods such as Finite Elements (FE) in modeling surface acoustic wave (SAW) devices lies in their ability to model devices involving complicated transducer geometries. We present a 3-D finite element model of a novel hexagonal SAW biosensor based on LiTaO 3 substrate. This SAW biosensor involves the use of one delay path for biological species detection whereas the other delay paths are used to simultaneously remove the nonspecifically bound proteins using the acoustic streaming phenomenon, thus eliminating biofouling issues associated with other biosensors. Prior to this biosensor fabrication on any piezoelectric substrate, it is important to establish the type of waves that are generated along the various delay paths. The choice of a delay path for sensing and simultaneous cleaning application depends on the propagation characteristics of the wave generated along the crystal cut and orientation corresponding to that delay path. The frequency response as well as wave propagation characteristics along the delay path corresponding to crystal orientation with on-axis propagation along 36° YX LiTaO3 substrate are analyzed using a coupled field FE model. Similar analysis is extended to the off-axis propagation directions corresponding to Euler rotations by 60° and -60° along the x-z plane. Our findings indicate that the onaxis direction with a significant surface shear horizontal (SH) component should be employed for biological species detection whereas the off-axis directions having mixed modes with a dominant Rayleigh wave component are most suitable for simultaneous cleaning or removal application.

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“…The first application of SAW can be traced to the invention of the piezoelectric transducer in the form of an interdigital comb [2]. The advantages of SAW are its capability to electro-acoustically access and propagate waves on a crystal surface and its wave velocity, which is approximately 100,000 times slower than that of electromagnetic waves [3,4].…”

Section: Introductionmentioning

confidence: 99%

Finite element analysis of surface acoustic wave based on a micro force sensor

Chen

et al. 2015

Measurement

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Design of efficient focused surface acoustic wave devices for potential microfluidic applications

Abstract: Articles you may be interested inEnhancement of acoustic streaming induced flow on a focused surface acoustic wave device: Implications for biosensing and microfluidics

Cited by 36 publications

References 32 publications

Development of an FPW Biosensor with Low Insertion Loss and High Fabrication Yield for Detection of Carcinoembryonic Antigen

Development of an FPW Biosensor with Low Insertion Loss and High Fabrication Yield for Detection of Carcinoembryonic Antigen

Finite Element modeling of hexagonal surface acoustic wave biosensor based on LiTaO<inf>3</inf>

Finite element analysis of surface acoustic wave based on a micro force sensor

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