Design of a polysilicon-on-insulator pressure sensor with original polysilicon layout for harsh environment

Polysilicon thin film piezoresistive pressure microsensor: design, fabrication and characterization

“…Various pressure sensors employing polysilicon based piezoresistors have also been reported in literature (Malhaire and Barbier 2003;Sivakumar et al 2006). In a piezoresistive pressure sensor, four resistors are placed on the top of diaphragm as shown in Fig.…”

“…7. For minimizing the mechanical influence of the metal lines on the diaphragm and the influence of the diaphragm deformation on the metal lines (which may lead to their breakage and affect the metal-piezoresistor contact), the piezoresistor shape are chosen to keep metal lines outside the diaphragm edges (Malhaire and Barbier 2003;Wei et al 2010).…”

Effect of piezoresistor configuration on output characteristics of piezoresistive pressure sensor: an experimental study

“…Using a Wheatstone bridge helps in cancelling out the temperature effects due to TCR (Kumar and Pant 2014b). Different materials have been reported to exhibit the property of piezoresistance, such as silicon (Zhang et al 2007;Bian et al 2009), polysilicon (Tsai et al 2009;Malhaire and Barbier 2003), silicon carbide (Fraga et al 2010;Wu et al 2006), carbon fibre (Park et al 2007), diamond (Werner et al 1998;Wur et al 1995) etc. Generally, silicon or polysilicon based piezoresistors are used in pressure sensor because of well-established fabrication processes for realizing the sensors.…”

Studies on SiC, DLC and TiO2 thin films as piezoresistive sensor materials for high temperature application

“…Regarding the thin film based piezoresistive sensors for harsh environments, in literature has been reported mainly strain gauges (Fraga et al 2010;Peiner et al 2006) and pressure sensors (Malhaire and Barbier 2003;Fraga et al 2011a;Wu et al 2001).…”