Design of a Novel Substrate-Free Double-Layer-Cantilever FPA Applied for Uncooled Optical-Readable Infrared Imaging System

Shi, Shali; Chen, Dapeng; Jiao, Binbin; Li, Chaobo; Ou, Yi; Jing, Yupeng; Ye, Tianchun; Zhang, Qingchuan; Dong, Fengzhong; Miao, Zhengyu; Duan, Zhihui

doi:10.1109/jsen.2007.909918

Cited by 4 publications

(3 citation statements)

References 9 publications

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“…The thermomechanical sensitivity of the cantilever pixel was measured as 0.11 μm/K. Another modification of substrate−free optical−readable FPA is introduction of double bimaterial−layer cantilever pix− els [50]. The top layer of the cantilever pixels consists of two materials with large mismatching TCE: SiN x and Au, which convert IR radiation into mechanical deflection (see Fig.…”

Section: Optically-coupled Cantileversmentioning

confidence: 99%

“…The high sensitivity of the cantilevers allows the individual pixels in the array to be shrunk from their current size of 50 μm to 20 μm while maintaining low−distortion IR imaging [25,40]. Considerable progress to reduce NEDT and time con− stant has been made in years by several research groups [20,25,[30][31][32][33]40,50,60,61,70,71]. Multispectral Imaging Inc. has developed a new class of electrically−coupled transdu− cers in which bending of the cantilever causes changing its capacitance.…”

Section: Novel Uncooled Focal Plane Arraysmentioning

confidence: 99%

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Novel uncooled infrared detectors

Rogalski

2010

Opto-Electronics Review

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Despite successful commercialization of uncooled microbolometers suitable for imaging, the community is still searching for a platform for imagers that combine affordability, convenience of operation, and excellent performance. More recently, a new type of uncooled detectors based on expansion phenomena in micromechanical structures has been introduced. These detectors are essentially free of intrinsic electronic noise and can be combined with a number of different readout techniques including: capacitive, piezoresistive, electron tunnelling, and optical. In this paper, their design structures and performance are discussed in more detail.

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Section: Optically-coupled Cantileversmentioning

confidence: 99%

Section: Novel Uncooled Focal Plane Arraysmentioning

confidence: 99%

Novel uncooled infrared detectors

Rogalski

2010

Opto-Electronics Review

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“…Therefore, the combination of metamaterial absorber and bi-material * Authors to whom any correspondence should be addressed. microcantilever array sensing technology has become another promising candidate for millimeter-wave imaging [19][20][21][22].…”

Section: Introductionmentioning

confidence: 99%

Perfect absorber with separated ‘dielectric–metal–ground’ metamaterial structure

Wang¹,

Jin²,

Wang³

et al. 2021

J. Phys. D: Appl. Phys.

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A metamaterial perfect absorber whose effective thickness is less than 1/1000 of the operating wavelength is proposed. Different from the traditional ‘metal–dielectric–ground’ type metamaterial absorber, it adopts a novel ‘dielectric–metal–ground’ structure, and the ‘dielectric–metal’ structure is separated from the ‘ground’. Through this design, the effective thickness of the absorber is reduced to about 1/2200 of the wavelength. This will make the absorber suitable for imaging and sensing applications. Next, a bi-material cantilever absorber based on the proposed structure is designed and fabricated to demonstrate the high absorption properties in the case of ultra-thin thickness. In addition, a reflective spectroscopy system based on a vector network analyzer is built to test the absorption performance. The measured results, showing that it has an absorptivity of close to 97% at 94 GHz, are in good agreement with simulations.

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