Design of a micro floating element shear stress sensor

Lv, Haifeng; Jiang, Chengyu; Xiang, Zhijie; Ma, Binghe; Deng, Jinjun; Yuan, Weizheng

doi:10.1016/j.flowmeasinst.2012.11.004

Cited by 22 publications

(8 citation statements)

References 12 publications

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“…Micro machined wall shear stress sensors are usually divided into two groups depending on their measurement techniques: direct techniques using floating element devices [6,7] and indirect measurement such as thermal anemometry [5,8].…”

Section: Introductionmentioning

confidence: 99%

High temperature gradient micro-sensors array for flow separation detection and control

Ghouila-Houri¹,

Talbi²,

Viard³

et al. 2019

Smart Mater. Struct.

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This paper reports the use of an array of calorimetric micro-sensors that perform bidirectional measurement of wall shear stress, for flow separation detection and control. The sensors design is hot-wire like with three parallel micro wires suspended over a micro-cavity and mechanically supported using periodic perpendicular micro-bridges. The micro-sensors were implemented on a flexible packaging and characterized in a turbulent boundary layer wind tunnel on a flat plate. An array of twelve microsensors were then implemented in a flap model designed for active flow control experiments and equipped with pulsed jet actuators. The work included the design and manufacturing of appropriate miniaturized electronics. Without control, the microsensors successfully detected the natural flow separation and the flow separation point moving from the trailing edge to the leading edge as the angle of the flap increased. Finally, the micro-sensors characterized the efficiency of the active flow control for avoiding separation.

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Section: Introductionmentioning

confidence: 99%

High temperature gradient micro-sensors array for flow separation detection and control

Ghouila-Houri¹,

Talbi²,

Viard³

et al. 2019

Smart Mater. Struct.

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“…However, wall shear stress measurements remain very challenging. Although various mechanical or electrical sensors has been developed for wall shear stress measurement, such as mechanical balances, intrusive probes [ 1 , 2 ], or micro-electro-mechanical systems (MEMS) [ 3 , 4 , 5 ], those methods are typically complicated, disturb the flow, destroy the surface, and measure point-wise. Therefore, any means to measure wall shear stress efficiently with a high spatial resolution would be interesting.…”

Section: Introductionmentioning

confidence: 99%

Measurement of Wall Shear Stress in High Speed Air Flow Using Shear-Sensitive Liquid Crystal Coating

Zhao

2018

Sensors

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Wall shear stress is an important quantity in fluid mechanics, but its measurement is a challenging task. An approach to measure wall shear stress vector distribution using shear-sensitive liquid crystal coating (SSLCC) is described. The wall shear stress distribution on the test surface beneath high speed jet flow is measured while using the proposed technique. The flow structures inside the jet flow are captured and the results agree well with the streakline pattern that was visualized using the oil-flow technique. In addition, the shock diamonds inside the supersonic jet flow are visualized clearly using SSLCC and the results are compared with the velocity contour that was measured using the particle image velocimetry (PIV) technique. The work of this paper demonstrates the application of SSLCC in the measurement/visualization of wall shear stress in high speed flow.

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“…These MEMS-based shear stress sensors provide several advantages, including high spatial and temporal resolutions and minimal sensitivity to vibrations because of the small size of the sensing elements. Techniques to detect the lateral deformation of a floating element can be categorized into optical-based [17], capacitive-based [18][19][20] and piezoresistive-based [21][22][23] methods. Optical-based methods offer relatively high sensitivity but require a complex apparatus to perform the measurement.…”

Section: Introductionmentioning

confidence: 99%

A wall shear stress sensor using a pair of sidewall doped cantilevers

Nguyen

Kazama

Takahashi

et al. 2017

J. Micromech. Microeng.

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In this paper, we report on a micro-electro mechanical system (MEMS)-based piezoresistive sensor for measuring shear stress induced by an airflow. The advantages of the proposed sensor include a simple sensing method and a high resonance frequency due to the small size of the sensing elements. Our sensor consists of a pair of 3 µm thick cantilevers with piezoresistors formed on the sidewall of their hinges to detect lateral deformation in the cantilevers induced by an airflow. Each cantilever has a 200 µm × 400 µm plate supported by two 150 µm long, 4 µm wide beams. The piezoresistors on the two cantilevers are designed to deform in opposite manners when a shear stress is applied and in the same manner when a pressure is applied. Therefore, the applied shear stress can be detected from the difference in the responses of the two cantilevers without becoming conflated with pressure. In this paper, the design, fabrication and evaluation of the proposed sensor are reported and compared to numerical simulation results. From the experimental results, the resolution of the sensor and its first resonance frequency are 1.3 Pa and 3.9 kHz, respectively. Moreover, we show that the effect of temperature on the readout of the sensor can be eliminated using a temperature-compensating piezoresistor fabricated on the same sensor chip. Finally, using the fabricated sensor, the measurement of the shear stress induced by an airflow with velocity between −10 and 10 m s−1 is demonstrated.

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Design of a micro floating element shear stress sensor

Cited by 22 publications

References 12 publications

High temperature gradient micro-sensors array for flow separation detection and control

High temperature gradient micro-sensors array for flow separation detection and control

Measurement of Wall Shear Stress in High Speed Air Flow Using Shear-Sensitive Liquid Crystal Coating

A wall shear stress sensor using a pair of sidewall doped cantilevers

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