2018
DOI: 10.1038/s41598-018-27410-4
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Design of a high-precision and non-contact dynamic angular displacement measurement with dual-Laser Doppler Vibrometers

Abstract: A wide dynamic range, high precision, non-contact and large bandwidth angular displacement measurement (ADM) is greatly necessary for the applications such as industrial control and military equipment. This paper proposes a simple and effective ADM method based on Doppler Effect, heterodyne detection and diffuse reflection, which can fulfill these requirements simultaneously. Two beams of parallel light generated by a pair of laser Doppler vibrometers are incident upon the surface of rotational target, then da… Show more

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Cited by 20 publications
(15 citation statements)
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(16 reference statements)
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“…As to optical metrology, it has attracted increasing attention due to its nondestructive detection, tracking to the wavelength source and strong electromagnetic immunity. Normal interferometric methods need two beams or more to decouple the motions in multi-degree-of-freedom for the angle measurement [10], [11]. Some other optical methods can also measure the angle variation, including auto-collimatic method [12], total internal reflection method [13], grating-based interferometer [14], birefringence heterodyne interferometry [15], surface plasmon resonance [16], self-mixing interferometry [17], and dual-comb interferometry [18].…”
Section: Introductionmentioning
confidence: 99%
“…As to optical metrology, it has attracted increasing attention due to its nondestructive detection, tracking to the wavelength source and strong electromagnetic immunity. Normal interferometric methods need two beams or more to decouple the motions in multi-degree-of-freedom for the angle measurement [10], [11]. Some other optical methods can also measure the angle variation, including auto-collimatic method [12], total internal reflection method [13], grating-based interferometer [14], birefringence heterodyne interferometry [15], surface plasmon resonance [16], self-mixing interferometry [17], and dual-comb interferometry [18].…”
Section: Introductionmentioning
confidence: 99%
“…As to optical metrology, it has attracted increasing attention due to its nondestructive detection, measuring traceability to the wavelength and strong electromagnetic immunity. Normal interferometric methods need two beams or more to decouple the motions in multi-degree-of-freedom for the angle measurement [10], [11]. Some other optical methods can also measure the angle variation, including auto-collimatic method [12], total internal reflection method [13], grating-based interferometer [14], birefringence heterodyne interferometry [15], surface plasmon resonance [16], self-mixing interferometry [17], and dual-comb interferometry [18].…”
Section: Introductionmentioning
confidence: 99%
“…The influence of the internal parasitic reflections of the LDV is analyzed in Ref [ 25 ]. When measuring the rotational angular displacement with dual LDVs, Ref [ 26 ] improves the measurement accuracy to 0.0088° after analyzing the influence of the light intensity non-uniformity error, the systematic defect error, the synchronization error, and the sampling frequency-caused error. Besides the analysis of SNR of the LDV, diverse optical configurations and signal processing methods have been reported in the scientific literature and by commercial manufacturers.…”
Section: Introductionmentioning
confidence: 99%