Design of a fast steering mirror driven by piezoelectric ceramics

Wan, Yuan; Xiong, Heng; Song, Tieqiang; Zhou, GuoWei; Huang, Minjie; Liu, Jiqiao; Hou, Xun; Chen, Weibiao

doi:10.1117/1.oe.61.2.024102

Cited by 6 publications

(3 citation statements)

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“…Based on a bonded‐type piezoelectric composite beam, Zhang et al [ 235 ] proposed a two‐axis piezoelectric tilting mirror with low capacitance for optical‐assisted micromanipulation, which reduced the requirement for power amplifier. A 2‐DOF piezoelectric fast steering mirror [ 236 ] was developed to solve the problems of small optical aperture and stroke in space laser communication and lidar systems, which achieved rotary stroke of 4.7 mrad. Csencsics et al [ 237 ] proposed a novel piezoelectric fast steering mirror with good tracking performance for high‐speed scanning, which achieved the angular stroke of 4.8 mrad.…”

Section: The Applications Of Multi‐dof Cross‐scale Piezoelectric Actu...mentioning

confidence: 99%

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Chang,

Chen,

Zhang

et al. 2024

Advanced Intelligent Systems

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Piezoelectric actuation technology has been widely used in various precise‐oriented fields. Its notable advantages include high resolution, rapid response speed, output force with high density, and immunity to electromagnetic interference. Characteristics of cross‐scale and multiple‐degree‐of‐freedom (multi‐DOF) output motions are of utmost importance in the context of micro‐/nanopositioning technology. For decades, researchers have been working to develop various piezoelectric devices that exploit these important properties. In this review, a comprehensive review of recent research efforts in the field of cross‐scale multi‐DOF piezoelectric drive technology is provided. To commence, it provides an in‐depth exploration of the unique advantages associated with piezoelectric actuation, demonstrating them through comparative analyses with alternative actuation methods. Subsequently, the complexity of piezoelectric cross‐scale motion is introduced, and the multi‐DOF piezoelectric motion is classified in detail. Furthermore, the practical applications of multi‐DOF cross‐scale piezoelectric actuation technology are systematically elucidated, highlighting its versatility and suitability in real‐world environments. Finally, an in‐depth discussion that addresses the challenges encountered in the field is provided, and the prospective directions for further developments in piezoelectric actuation technology are outlined. This scholarly contribution plays an important role in guiding future research and innovative initiatives.

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Section: The Applications Of Multi‐dof Cross‐scale Piezoelectric Actu...mentioning

confidence: 99%

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Chang,

Chen,

Zhang

et al. 2024

Advanced Intelligent Systems

View full text Add to dashboard Cite

show abstract

“…Generally speaking, a FSM consists of a mirror, a mirror holder, a support plate, a base, an actuator (e.g. Piezo actuator, PZT), and a flexure hinge [10][11][12][13][14][15], as shown in figure 3(a). When the driver input line is displaced, the mirror will rotate around the center of the flexure hinge instead of the center of the mirror.…”

Section: Introductionmentioning

confidence: 99%

A fast steering mirror with ultra-low geometric tilt-to-length coupling noise for space-borne gravitational wave detection

Wu,

Hai,

Fang

et al. 2023

Meas. Sci. Technol.

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The misalignment between the geometric center and rotation center in fast steering mirrors (FSMs) poses a challenge for space-borne gravitational wave detection, as it results in geometric tilt-to-length (TTL) coupling noise. To address this issue, we have proposed a FSM structure that exhibits ultra-low geometric TTL coupling noise. The geometric TTL coupling noise is analyzed and evaluated strictly considering the FSM non-ideal tilt of the plane and the center shift characteristic of cartwheel flexure hinges under a small rotational angle. Compared to traditional FSM designs, our new design offers superior noise suppression capabilities and is capable of meeting the stringent piston effect noise requirements of 0.2 pm / Hz in the frequency band of 10 − 4 Hz ∼ 1 Hz under ideal conditions.

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“…However, with the increasing engineering demand, the disadvantages of piezoelectric ceramics such as small stroke, high power consumption, and complex driving circuit are gradually highlighted. What is more di cult is that piezoelectric ceramics are extremely sensitive to the humidity of the environment [11], which is not conducive to use in complex and changeable environments. In this regard, the fast steering mirror driven by voice-coil motor just effectively overcomes the above shortcomings, especially its stroke can reach 10 °∼15 °, which is unmatched by piezoelectric ceramic driving mode [12].…”

Section: Introductionmentioning

confidence: 99%

Negative Effect Compensation of Disturbance for High-Precision Voice Coil Fast Steering Mirror

Wang

et al. 2022

Mathematical Problems in Engineering

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In order to further improve the stability of the composite axis aviation photoelectric stabilization platform, a control method of negative effect compensation of disturbance (NECOD) is proposed and applied to the voice-coil fast steering mirror adjusting the optical path of the platform. The experimental results show that the control accuracy and closed-loop bandwidth of the voice-coil fast steering mirror based on NECOD have been greatly improved, while its advantages of large stroke are not possessed by piezoelectric fast mirror. The experimental results of high-frequency turntable and vibration table show that NECOD proposed in this paper has better antidisturbance performance than DOB and ARC, and its parameters are less and easy to adjust. It is proved that the robustness of NECOD is very strong in the presence of 20% parameter perturbation. The final LOS stabilization accuracy experiment shows that the NECOD voice-coil fast steering mirror proposed in this paper fully meets the performance requirements of high-precision aviation photoelectric stabilization platform, and has high practical value for improving the antidisturbance performance of the control system of aviation photoelectric stabilization platform.

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Design of a fast steering mirror driven by piezoelectric ceramics

Cited by 6 publications

References 0 publications

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

Review on Multiple‐Degree‐of‐Freedom Cross‐Scale Piezoelectric Actuation Technology

A fast steering mirror with ultra-low geometric tilt-to-length coupling noise for space-borne gravitational wave detection

Negative Effect Compensation of Disturbance for High-Precision Voice Coil Fast Steering Mirror

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